Design of Silicon Nitride Arrayed Waveguide Grating at 2μm Wavelength Band

Di Li,YingJie Liu,Ke Xu

DOI: https://doi.org/10.1117/12.2588522

2021-01-01

Abstract:We demonstrated the design of a 16-channel silicon nitride arrayed waveguide grating at 2μm wavelength band. The AWG has a channel spacing of 200GHz. The insertion loss is ~1.57dB, and the crosstalk is -23.06dB.

What problem does this paper attempt to address?

Design and Fabrication of 8×8 Silica-Based Arrayed Waveguide Grating

LI Guang-bo,LONG Wen-hua,JIA Ke-miao,TANG Yan-zhe,WU Ya-ming,YANG Jian-yi,WANG Yue-lin

2006-01-01

Abstract:An 8×8 silica-based arrayed waveguide grating(AWG) with the central wavelength of 1.55 μm and the channel spacing of 0.8 nm is designed and fabricated.The design,fabrication and test process are presented in details.According to the test results of the packaged chip,the 3 dB bandwidth of the device is 0.22 nm,the minimum and maximum channel loss are 4.01 dB and 6.32 dB,respectively,when the central input channel is used,while the corresponding values for the outermost input channel are 6.24 dB and 9.02 dB,respectively.The output wavelength shift is below 0.039 nm.The crosstalk of the device is better than -25 dB.And the PDL of the device is less than 0.3 dB.
Design and fabrication of 1 × 32 silica-based arrayed waveguide grating

WenHua Long,GuangBo Li,Kemiao Jia,Hongchang Qu,Yanzhe Tang,Yaming Wu,Jianyi Yang,Yuelin Wang-

2005-01-01

Abstract:A 1 × 32 silica-on-silicon-based arrayed waveguide grating is designed and fabricated. The detailed consideration of waveguide bending, coupling between adjacent waveguides, and the taper structure for the design of the arrayed waveguide grating is presented. By applying the high-resolution photomask, PECVD-based silica deposition, reactive ion etching, and 8° end-face polishing, a AWG chip is obtained with crosstalk lower than -28 dB for the adjacent channels and -35 dB for the non-adjacent channels. The average insertion loss is about 4.9 dB and the imbalance is approximately 1.72 dB after the chip is fiber-array coupled and packaged.
Silicon Photonic Arrayed Waveguide Grating with 64 Channels for the 2 Μm Spectral Range.

Yingjie Liu,Xi Wang,Yong Yao,Jiangbing Du,Qinghai Song,Ke Xu

DOI: https://doi.org/10.1364/ol.452476

IF: 3.6

2022-01-01

Optics Letters

Abstract:Driven by the demand to extend optical fiber communications wavelengths beyond the C + L band, the 2 µm wave band has proven to be a promising candidate. Extensive efforts have been directed into developing high-performance and functional photonic devices. Here we report an integrated silicon photonic arrayed waveguide grating (AWG) fabricated in a commercial foundry. The device has 64 channels with a spacing of approximately 50 GHz (0.7 nm), covering the bandwidth from 1967 nm to 2012 nm. The on-chip insertion loss of the AWG is measured to be approximately 5 dB. By implementing a TiN metal layer, the AWG spectrum can be thermally tuned with an efficiency of 0.27 GHz/mW. The device has a very compact configuration with a footprint of 2.3 mm × 2 mm. The demonstrated AWG can potentially be used for dense wavelength division multiplexing in the 2 µm spectral band.
Compact Arrayed-Waveguide Grating on Silicon-On-Insulator with Integrated Waveguide Turning Mirrors

GB Li,Z Gong,KM Jia,WH Long,JY Yang,XQ Jiang,YL Wang,MH Wang

DOI: https://doi.org/10.1088/0256-307x/22/12/033

2005-01-01

Abstract:A compact arrayed-waveguide grating (AWG) on the silicon-on-insulator material is designed and fabricated with employment of waveguide-integrated turning mirrors (WITMs). By properly setting the incident angle with the value of 45 degrees, the effective area of the WITM AWG is only 1.15 cm x 1.15 cm with the arrayed waveguide area of 0.6 cm x 0.6 cm. The crosstalk of the fabricated 1 x 6 AWG is better than -19 dB. The on-chip insertion loss is about -8.8 dB and the output nonuniformity is less than 0.6 dB. The polarization-dependent central wavelength shift is about 0.048 nm and the polarization dependent loss is neglectable.
High-Performance 32-Channel Silicon Arrayed Waveguide Grating With 100 GHz Spacing

Fang Zou,Lian-shan Yan,X. Zou,W. Pan,Changjian Xie,Yong Zhang

DOI: https://doi.org/10.1109/LPT.2023.3242994

IF: 2.6

2023-04-01

IEEE Photonics Technology Letters

Abstract:A high-performance 32-channel silicon arrayed waveguide grating (AWG) with 100 GHz spacing is designed and fabricated using 180-nm lithography platform for massive production. For the arrayed waveguides, a rectangular structure compositing of a straight waveguide and a 90-degree bend waveguide is designed. Moreover, the overall structure only needs to be etched once to reduce the error introduced in the fabricating process. The experiment results show that the AWG operates with high performance within short, central, and long wavelength bands (i.e., S+C+L bands). Taking the measured central wave band (C band) as an example, a channel uniformity of 2.05 dB, a crosstalk lower than -20 dB, and an insertion loss less than 4.85 dB are achieved across the wavelength range from 1544 nm to 1576 nm. As far as we know, this fabricated silicon AWG demonstrates the best comprehensive performance for $32\times 100$ -GHz channels achieved using lithography, which will be highly desirable for wavelength division multiplexing communication and microwave photonics systems.

Materials Science,Physics,Engineering
Ultra-compact arrayed waveguide grating triplexer based on silicon-on-insulator platform

Jun Zou,Xianxin Jiang,Tingting Lang,Jianjun He

DOI: https://doi.org/10.1109/CLEOPR.2013.6600263

2013-01-01

Abstract:We have demonstrated an ultra-compact birefringence-compensated arrayed waveguide grating (AWG) triplexer based on silicon nanowire waveguide. The cross-order design is employed and the device has a small footprint of 0.18×0.12 mm2. The normalized losses for TM polarization for three channels are less than 4 dB with the crosstalk better than 18 dB. The polarization dependent wavelength shift (PDλ) is less than 2.5 nm for three channels operating at the wavelength range of 1490-1550 nm by using angled star couplers in combination with different diffraction orders for the two polarizations.
Thermo-Optic Tunable Silicon Arrayed Waveguide Grating at 2-Μm Wavelength Band

Yingjie Liu,Zhiyu Li,Di Li,Yong Yao,Jiangbing Du,Zuyuan He,Ke Xu

DOI: https://doi.org/10.1109/jphot.2020.3001595

IF: 2.4

2020-01-01

IEEE Photonics Journal

Abstract:The transparent window in optical fiber at 2-μm waveband enables a huge potential for fiber optical communications. Intensive efforts have been devoted to pursuit of photonic devices in this new band. The arrayed waveguide grating (AWG) is one of the key components for various functionalities like wavelength multiplexer, optical filter, spectrometer and so forth. However, the integrated and wavelength tunable AWG has not been realized in the 2-μm wavelength range yet. Here, we demonstrate an 8-channel thermo-optic tunable AWG at 2 μm via silicon photonic multi-project wafer shuttle run. The device is fully compatible with standard foundry fabrication process without customization. The TiN heater is designed for uniform waveguide heating and wavelength detuning. Experiments show that the fabricated AWG has a dense channel spacing of 1.6 nm and a minimum insertion loss of 6.1 dB. The wavelength tuning efficiency is measured to be 6.4 nm/W.
Loss uniformity improvement for cyclic arrayed waveguide grating based on silicon nanowire waveguides

xiang xia,yang chen,jun zou,tingting lang,jianjun he

DOI: https://doi.org/10.1109/OGC.2015.7336857

2015-01-01

Abstract:A cyclic arrayed waveguide grating (AWG) router based on silicon nanowire waveguides with uniform channel insertion loss is designed and experimentally demonstrated. Different from conventional design, the directions of arrayed waveguides are no longer pointed to the central output waveguide, but are adjusted according to a distribution function. The experimental results show that the channel insertion loss non-uniformity is reduced from 2.7 dB to 1.1 dB. This uniform loss design does not change the overall construction of AWGs, and does not increase the device size.
Inverse Design of High Extinction Ration Narrow-Band Filters Based on Silicon Nitride Multimode Waveguide Bragg Gratings

Nannan Ning,Wei Zhujun,Huang Qikai,Wang Yuehai,Yang Jianyi,Yu Hui

DOI: https://doi.org/10.1117/12.3009299

2023-01-01

Abstract:A silicon nitride narrow-band multimode waveguide Bragg grating (NBMWBG) optical filter with high SLSR and low insertion loss based on the inverse design of MWBG is demonstrated. The complementary lateral-misalignment modulation apodization is used to create physically grating structure of NBMWBG. The insertion loss, 3-dB bandwidth and SLSR of proposed NBMWBG are measured to be 0.9 dB, 0.8 nm and 32 dB, respectively. Keywords: Silicon nitride, Bragg grating, Narrow-band,
Birefringence compensated arrayed waveguide grating

jun zou,xiang xia,tingting lang,jianjun he

DOI: https://doi.org/10.1117/12.2071941

2014-01-01

Abstract:In this paper we review our work on birefringence compensated arrayed waveguide grating. We elaborate on a birefringence compensation technique based on angled star couplers in arrayed waveguide grating (AWG) and discuss several demonstrations both in low-index-contrast and high-index-contrast material systems. A 16-channel AWG with 100GHz channel spacing for DWDM application is designed and fabricated in silica-based low-index-contrast waveguide. The experimental results confirm that the polarization-dependent wavelength shift (PD lambda) can be tuned by varying the incident/diffraction angle at the star couplers and a birefringence-free property can be achieved without additional fabrication process as compared to conventional AWG. A further validation of this technique is demonstrated in high-index-contrast silicon-on-insulator waveguide, in combination with different diffraction orders for TE and TM polarizations. A birefringence compensated silicon nanowire AWG for CWDM optical interconnects is designed and fabricated. The theoretical and experimental results show that the PD lambda can be reduced from 380-420nm to 0.5-3.5 nm, below 25% of the 3 dB bandwidth of the channel response in the wavelength range of 1500 to 1600nm.
Polarization Dispersion Compensated Arrayed Waveguide Gratings Design Based on Silicon Nanowires

Jun Zou,Tingting Lang,Jian-Jun He

2011-01-01

Abstract:A simple method to design polarization dispersion compensated arrayed waveguide gratings based on silicon nanowires is proposed using angled star couplers with different diffraction orders for TE and TM polarizations. Polarization dispersion compensation for all channels is achieved by using a 380nm×220nm silicon waveguide with an upper-cladding of SU-8. The simulation results demonstrate the validity of the design.
High-performance Silicon Arrayed-Waveguide Grating (de)multiplexer with 0.4-Nm Channel Spacing

Xiaowan Shen,Weike Zhao,Huan Li,Daoxin Dai

DOI: https://doi.org/10.1109/oecc56963.2023.10209614

2024-01-01

Abstract:We present a 0.4-nm channel spacing silicon arrayed-waveguide grating with Euler-bend-assisted broadened arrayed waveguides and shallowly-etched transition regions. For the present AWG, the excess loss is 0.65-3.11 dB and the crosstalk is below-18 dB.
Silicon-Based Arrayed Waveguide Gratings for WDM and Spectroscopic Analysis Applications

Jun Zou,Fangyuan Sun,Changhui Wang,Ming Zhang,Junnan Wang,Tingting Lang,Xuyang Wang,Zichun Le,Jian-Jun He

DOI: https://doi.org/10.1016/j.optlastec.2021.107656

2022-01-01

Abstract:We compare the performance of silicon-based arrayed waveguide gratings (AWGs) with star couplers of Rowland and Confocal configurations, respectively, for both TE and TM polarizations. The star coupler with Rowland configuration and constant projection period for phased array waveguides on the tangent line at the grating pole shows sufficiently small aberration for all output channels of AWGs, achieving a better spectral performance compared to the Confocal configuration. The spectral performance of AWGs is also highly dependent on phase errors resulting from fabrication imperfections which are unavoidable in current fabrication technology, hence it is of significant importance to make the phase region of AWGs as small as possible. Using the optimized star coupler configuration, ultracompact large channel spacing AWGs employing a single bend with a different radius for each waveguide in the phase array and a S-shaped waveguide array, respectively, are fabricated and compared, together with high resolution (de)multiplexers utilizing the cascade of (N + 1) x (N + 1) AWGs and polarization combiner-rotator/rotator-splitter. High resolution ultracompact spectrometers using bidirectional (N + 1) x (N + 1) AWGs operating at TE and TM polarizations are also designed and fabricated. All the experimental results indicate that a smaller footprint for the phase region of AWGs contributes to an improved performance in their spectral responses. We also discuss the ways to reduce the size of phase region and suggest that decreasing the pitch of adjacent output waveguides on the imaging plane is an effective way. This paper provides design considerations for silicon-based AWGs towards various applications such as wavelength division multiplexing (WDM) and spectroscopic analysis.
Silica-Based Arrayed Waveguide Grating With Flattened Spectral Response Using A Multimode Interference Coupler

Yz Tang,Km Jia,By Li,Jy Yang,Xq Jiang,Ym Wu,Yl Wang

DOI: https://doi.org/10.1088/0256-307X/21/6/024

2004-01-01

Chinese Physics Letters

Abstract:We designed and fabricated an arrayed waveguide grating based on silica-on-silicon materials with flattened spectral response by adding a multimode interference coupler in the input region. The theoretical analysis and calculation are given. The device has worked effectively and has been tested with the passband 0.43 nm at 1 dB, 0.72 nm at 3 dB and 1.56 nm at 20 dB respectively, at a cost of power penalty of about 1.5 dB. The crosstalk is less than -30 dB, owing to the high-resolution photomask and well-controlled fabrication processes.
A Novel Design Of Compact-Structure Arrayed-Waveguide Grating Device

By Li,Xq Jiang,Jy Yang,Mh Wang

DOI: https://doi.org/10.1117/12.444529

2001-01-01

Abstract:A novel type of compact-structure arrayed-waveguide grating (AWG) device is designed based on silicon-on-insulator (SOI) material. The size of the eight-channel AWG device is about 1.2x 1.2cm(2). In order to compensate TE-TM polarization, a total internal reflection (TIR) mirror is fabricated at the middle of each arrayed waveguide. When reflecting on this mirror, TE and TM modes have different phase changes. Through calculating the incidence angle, lightwaves of TE and TM modes which are at the same order can converge into the same output waveguide, thus the TE-TM shift is diminished. Due to this TIR mirror design, the total length of curved waveguides is reduced, while more straight waveguides are used. So the curved waveguide loss is reduced and the device size is diminished. The experimental results are given and feasibility of fabrication is tested.
Birefringence compensated silicon nanowire arrayed waveguide grating for CWDM optical interconnects.

Jun Zou,Xiang Xia,Guanting Chen,Tingting Lang,Jian-Jun He

DOI: https://doi.org/10.1364/OL.39.001834

IF: 3.6

2014-01-01

Optics Letters

Abstract:We demonstrate an arrayed waveguide grating based on silicon nanowires with birefringence compensation for optical interconnects using coarse wavelength division multiplexing (CWDM). Angled star couplers are employed in combination with different diffraction orders for TM and TE polarizations. This device has a compact footprint of 0.36 mm x 0.17 mm. Theoretical and experimental results show that the polarization-dependent wavelength shifts (PD lambda) can be reduced from 380-420 to 0.5-3.5 nm, below 25% of the 3 dB bandwidth of channel response. The measured cross talk for TM polarization is better than -18 dB, and that for TE is better than -14 dB. (C) 2014 Optical Society of America
Mirror-Integrated Arrayed-Waveguide Grating On Silicon-On-Insulator

Km Jia,Wh Wang,Yz Tang,Yr Yang,Jy Yang,Xq Jiang,Ym Wu,Mh Wang,Yl Wang

DOI: https://doi.org/10.1117/12.576059

2005-01-01

Abstract:In this paper we design and fabricate the first mirror-integrated silicon-on-insulator-based (SOI-based) arrayed-waveguide grating (AWG) with working functions. The fabricated AWG has a channel spacing of 1.6 nm centered at 1556 nm. We substitute the bent waveguides array in the traditional AWG configuration by adopting the structure of the mirror-integrated straight waveguides. Theoretical advantages of the new structure are demonstrated. Detailed description of the design procedure and the fabrication process is provided. Test results of both the traditional AWG and this design are delineated and analyzed, which shows that the total length of the waveguide array is reduced from 3.14 cm to 2.53 cm, and the holistic structure also becomes more compact. The crosstalk of the fabricated 1x8 AWG is better than -20 dB. The typical on-chip insertion loss is about 10 dB. Losses caused by the mirrors and the waveguides transmission are about 4.2 dB, both of which resulted from the imprecision in the fabrication process.
Design and Simulation of Temperature-Insensitive Arrayed Waveguide Gratings Based on Silicon Nanowires

Yan Chen,Tingting Lang,Jun Zhou,J. -J. He

DOI: https://doi.org/10.1117/12.905502

2011-01-01

Abstract:The design and simulation results of temperature-insensitive arrayed waveguide gratings based on silicon nanowires are presented. The temperature dependent wavelength shift is minimized by using negative thermo-optic coefficient material SU-8 as the upper-cladding. Simulation results show that by using an appropriate thickness and width of the waveguide, quasi-athermal operation can be achieved. For temperature varying from 0°C to 80°C, the TD-CWS can be controlled down to 0.036nm with little polarization dependence for 272nm×253nm waveguide.
Folded 15-Channel Arrayed Waveguide Gratings on Silicon Nitride Platform with Loop Reflector

Heming Hu,Qing Fang,Shuxiao Wang,Xindan Zhang,Xiaoyue Ma,Miaomiao Gu,Lianxi Jia,Hua Chen

DOI: https://doi.org/10.1016/j.optcom.2021.127321

IF: 2.4

2021-01-01

Optics Communications

Abstract:Silicon nitride (Si3N4) arrayed waveguide gratings (AWGs) have been widely used for dense wavelength division multiplexing systems because of their low loss and crosstalk. However, they have larger footprints because of their lower relative index compared with silicon-on-insulator (SOI) devices. In this study, a folded 1x15 Si3N4 AWG was fabricated on an SOI wafer with a silicon photonics loop reflector. The combination of the Si3N4 AWG and the Si loop reflector greatly reduced the device footprint and increased the fabrication tolerances. A layer coupler was used to connect the arrayed waveguides of the AWG to the Si loop reflector. The folded AWG consisted of a half Si3N4 AWG structure, an layer coupler array, and a Si loop reflector array. The measured insertion loss and crosstalk of the designed AWG were -5.46 dB and -17.2 dB, respectively. The integration of the half Si3N4 AWG and the arrayed Si loop reflectors can effectively reduce the large footprint of a Si3N4 AWG device with a standard complementary metal-oxide-semiconductor process while maintaining a relatively high performance.

Design of Silicon Nitride Arrayed Waveguide Grating at 2μm Wavelength Band

Design and Fabrication of 8×8 Silica-Based Arrayed Waveguide Grating

Design and fabrication of 1 × 32 silica-based arrayed waveguide grating

Silicon Photonic Arrayed Waveguide Grating with 64 Channels for the 2 Μm Spectral Range.

Compact Arrayed-Waveguide Grating on Silicon-On-Insulator with Integrated Waveguide Turning Mirrors

High-Performance 32-Channel Silicon Arrayed Waveguide Grating With 100 GHz Spacing

Ultra-compact arrayed waveguide grating triplexer based on silicon-on-insulator platform

Thermo-Optic Tunable Silicon Arrayed Waveguide Grating at 2-Μm Wavelength Band

Loss uniformity improvement for cyclic arrayed waveguide grating based on silicon nanowire waveguides

Inverse Design of High Extinction Ration Narrow-Band Filters Based on Silicon Nitride Multimode Waveguide Bragg Gratings

Birefringence compensated arrayed waveguide grating

Polarization Dispersion Compensated Arrayed Waveguide Gratings Design Based on Silicon Nanowires

High-performance Silicon Arrayed-Waveguide Grating (de)multiplexer with 0.4-Nm Channel Spacing

Silicon-Based Arrayed Waveguide Gratings for WDM and Spectroscopic Analysis Applications

Silica-Based Arrayed Waveguide Grating With Flattened Spectral Response Using A Multimode Interference Coupler

A Novel Design Of Compact-Structure Arrayed-Waveguide Grating Device

Birefringence compensated silicon nanowire arrayed waveguide grating for CWDM optical interconnects.

Mirror-Integrated Arrayed-Waveguide Grating On Silicon-On-Insulator

Design and Simulation of Temperature-Insensitive Arrayed Waveguide Gratings Based on Silicon Nanowires

Folded 15-Channel Arrayed Waveguide Gratings on Silicon Nitride Platform with Loop Reflector