A High-Accuracy, High-Speed Dynamic Performance Test Method for Heterodyne Interferometry Measurement Electronics
Yunke Sun,Xu Xing,Wenjun Li,Jianing Wang,Pengcheng Hu,Jiubin Tan
DOI: https://doi.org/10.1109/tim.2024.3472836
IF: 5.6
2024-10-29
IEEE Transactions on Instrumentation and Measurement
Abstract:In the field of heterodyne interferometry, the dynamic performance of measurement electronics decisively influences the dynamic measurement capabilities of the interferometer. The existing test methodologies fail to simultaneously provide comprehensive, rapid, and precise evaluations. Thus, this research introduces an equivalent testing approach, informed by an analysis of phase, frequency, and contrast characteristics of dynamic interference signals. This method employs intensity modulation via an acoustic optical modulator (AOM), ensuring phase stability and, thus, high testing accuracy. The design incorporates beam tuners and harmonic-optimized modulation, enhancing the signal frequency range and contrast variability, thereby enabling high equivalent speed. A testing apparatus was constructed, and a series of experiments were conducted. The results demonstrated the ability of the method to evaluate the dynamic performance of measurement electronics with an accuracy of 0.03 nm, within a maximum speed of 2.69 m/s and a contrast range of 10%–90%. This technique outperforms other methods by improving the testing accuracy by one to two orders of magnitude, increasing the equivalent speed from static to the order of m/s, and introducing contrast evaluation.
engineering, electrical & electronic,instruments & instrumentation