Abstract:In order to fulfill the requirements for high-resolution and high-precision heterodyne interferometric technologies and instruments, the laser interferometry group of HIT has developed some novel techniques for high-resolution and high-precision heterodyne interferometers, such as high accuracy laser frequency stabilization, dynamic sub-nanometer resolution phase interpolation and dynamic nonlinearity measurement. Based on a novel lock point correction method and an asymmetric thermal structure, the frequency stabilized laser achieves a long term stability of 1.2×10-8, and it can be steadily stabilized even in the air flowing up to 1 m/s. In order to achieve dynamic sub-nanometer resolution of laser heterodyne interferometers, a novel phase interpolation method based on digital delay line is proposed. Experimental results show that, the proposed 0.62 nm, phase interpolator built with a 64 multiple PLL and an 8-tap digital delay line achieves a static accuracy better than 0.31nm and a dynamic accuracy better than 0.62 nm over the velocity ranging from -2 m/s to 2 m/s. Meanwhile, an accuracy beam polarization measuring setup is proposed to check and ensure the light’s polarization state of the dual frequency laser head, and a dynamic optical nonlinearity measuring setup is built to measure the optical nonlinearity of the heterodyne system accurately and quickly. Analysis and experimental results show that, the beam polarization measuring setup can achieve an accuracy of 0.03° in ellipticity angles and an accuracy of 0.04° in the non-orthogonality angle respectively, and the optical nonlinearity measuring setup can achieve an accuracy of 0.13°.

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