Measurement Of Thin Cylinder Diameter By Optical Diffraction

Jw Cui,Wy Tang,Hp Li
2004-01-01
Abstract:In order to improve the measurement accuracy of thin cylinder diameter by optical diffraction, a novel measurement model is proposed. The problem arisen in measurement by using customary model of optical diffraction measurement is analyzed in this paper. Light intensity distribution equation of Fraunhofer diffraction of single metal slit is deduced individually with vector theory on condition that the incident optical fields are E polarized field and H polarized field. And according to Babinet's principle, the vector model of thin cylinder diameter measurement is obtained. The vector model indicates that the measurement results vary with the vibrating direction of polarized light and the variation ranges from the measurement result acquired with E polarized incident field to that acquired with H polarized incident field. Experimental result shows that the use of vector model in the measurement of thin cylinder diameter enables the relative error of measurement to be less than 0.7% and proves the relation between measurement results and vibrating direction of polarized light.
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