A Closed-Loop Sigma Delta Modulator For Micromechanical Capacitive Sensors

Risheng Lv,Weiping Chen,Liang Yin,Qiang Fu,Xiaowei Liu,Jingmin Yan
DOI: https://doi.org/10.1587/elex.15.20171112
2018-01-01
IEICE Electronics Express
Abstract:This paper describes a CMOS fully-differential switched-capacitor (SC) single-loop Sigma-Delta (Sigma Delta) modulator specialized for highly precise micromechanical capacitive sensors. This design adopts a single-loop, fourth-order, one-bit quantization architecture with feedforward paths for lower nonlinearities and power consumption. Systematic optimization is used to avoid deterioration in conversion accuracy caused by capacitor mismatch. Chopper-stabilization and double-sampling techniques are also employed to enhance performances in noise depression. Manufactured in a standard 0.35 mu m CMOS process, the ASIC occupies an area of 5.32mm(2) including 25 pads. This modulator achieves a signal-to-noise ratio (SNR) of 105.2 dB and dynamic range (DR) of 113.7 dB. The whole chip consumes 12.6mW from a 5V supply.
What problem does this paper attempt to address?