Synthesis of Highly Uniform Monolayer Graphene by Etching the Multilayer Spots for Electronic Devices

Pei Peng,Zidong Wang,Zhongzheng Tian,Yuehui Jia,Xin Gong,Jianhong Song,Liming Ren,Yunyi Fu
DOI: https://doi.org/10.1109/icsict.2016.7999053
2016-01-01
Abstract:We demonstrate a facile method to grow highly uniform monolayer graphene films on copper foils by atmospheric pressure chemical vapor deposition (APCVD). The technique in this method includes lowering flow ratio of methane/hydrogen and extending exposure time to hydrogen. All the multilayer islands will be etched away by hydrogen during this growth process, resulting in obtaining highly uniform monolayer graphene. A mechanism for the suppression of mutilayer spots based on the etching effect of hydrogen is proposed. The electron and hole room-temperature mobilities for the back-gated graphene transistors are up to about 3800 cm 2 V -1 s -1 and 3300 cm 2 V -1 s -1 , respectively.
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