Improved Thermal Model And Its Application In High-Power Laser Ablation Of Target

Ranran Fang,Duanming Zhang,Hua Wei,Zhihua Li
2009-01-01
Abstract:Among various candidates considered to grow high-quality thin film materials, pulsed laser deposition (PLD) technique has attracted much attention over past years due to its special advantage that the target component is similar to the thin film. During PLD process, pulsed laser ablation (PLA) is an important stage which determines the quality and the efficiency in making thin film. Therefore, the investigation of the corresponding thermodynamic process of PLA is very significant and the relevant researches are widely developed. In this chapter, we review recent works of PLA including the improved thermal model. The concrete works include an improved thermal model describing UV high-power nanosecond laser ablation of metal target, and a tailed thermal model describing IR high-power nanosecond laser ablation of multi-elemental oxide superconductor target. Under the same parameters, the comparison between the numerical results and the experimental data is also presented.
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