Abstract:Next generation cosmic microwave background (CMB) polarimetry experiments aim to deploy order 500,000 detectors, requiring repeatable and reliable fabrication process with stable and uniform transition edge sensor (TES) bolometer performance. We present a hafnium (Hf)-based TES bolometer for CMB experiments. We employ a novel heated sputter deposition of the Hf films enabling us to finely tune the critical temperature (Tc) between 140 mK - 210 mK. We found elevated deposition temperatures result in films with lower stress, larger crystal sizes, and a smaller relative abundance of the m-plane to c-plane $\alpha$ phase, all contributing to the empirical linear dependence of critical temperature on deposition temperature. Crucially, the heated sputter deposition simultaneously ensures that the critical temperature does not drift despite exposure to heat throughout ongoing fab processes (sometimes reaching 350C) as long as the initial deposition temperature is not exceeded. Tcs lower than 170 mK require deposition temperature greater than 400C, far in excess of typical temperatures the wafer may experience. This ample thermal budget allows us to relax the stringent thermal management that conventional aluminum manganese (AlMn) TES bolometers require, for which temperatures as low as 200C - 250C are used to anneal the AlMn in an effort to adjust the Tc. Hf additionally exhibits an intrinsic steep superconducting transition (we measure $\alpha >$ 200) and a corresponding high loop gain (exceeding $\mathcal{L}>10$ deep in the transition). We precisely design the normal resistance of the TES to range between 10 milli-Ohm and 1 Ohm through an interdigitated geometry, making these TES bolometers compatible with both TDM, FDM, and $\mu$-mux readout systems. We report on bolometer parameters including critical temperature, normal resistance, saturation power, time constant, and loop gain.

Stable Temperature Regulation for TES Testing below 200mk Employing Improved Cohen-Coon Method

Development of TES-based X-ray Microcalorimeters for HUBS

Preliminary Design of a 4-K Mechanical Cooling System for the HUBS Mission

Characterization and Improvement of the Thermal Stability of TES Bolometers

Low-temperature Characterization of Mo/Cu TES Devices for HUBS

A BJT-Based CMOS Temperature Sensor with Duty-Cycle-Modulated Output and ±0.5°C (3σ) Inaccuracy from −40 °C to 125 °C

Numerical Simulation and Experimental Verification of Dynamic Cooling and Temperature Control of the Optical Cavity in a Co2 Isotope Analyzer

Developing X-Ray Microcalorimeters Based on TiAu TES for HUBS

Development of hafnium-based transition edge sensor bolometers for cosmic microwave background polarimetry experiments

Electrothermal Properties Characterization of Transition Edge Sensor Bolometers Based on R-T Tests

Monte Carlo Comparisons to a Cryogenic Dark Matter Search Detector with low Transition-Edge-Sensor Transition Temperature

Design and characterization of a 90 GHz CMB TES bolometer

A Study of Al-Mn Transition Edge Sensor Engineering for Stability

Properties of Low TC AlMn TES

Transition edge sensor based detector: from X-ray to $γ$-ray

Transition-Edge Sensor Microcalorimeters for X-ray Beamline Science

Development of the characterization methods without electrothermal feedback for TES bolometers for CMB measurements

A Study of Mk Cooling System for Space Application

Transition-Edge Sensors for cryogenic X-ray imaging spectrometers

Wide-Range Bolometer with RF Readout TES

Mapping TES Temperature Sensitivity and Current Sensitivity as a Function of Temperature, Current, and Magnetic Field with IV curve and Complex Admittance Measurements