High De-Magnification Hyperlens

Jingbo Sun,Natalia M. Litchinitser

DOI: https://doi.org/10.1364/cleo_qels.2018.fm3j.4

2018-01-01

Abstract:We design and fabricate a hyperlens with a large demagnification of 3.75. We experimentally demonstrate such hyperlens' capability to compress the original patterns with feature size of 300nm down to 80nm using 405nm light.

What problem does this paper attempt to address?

Experimental Demonstration of the De-Magnifying Hyperlens

Jingbo Sun,Tianboyu Xu,Natalia M. Litchinitser

DOI: https://doi.org/10.1364/cleo_qels.2016.fth4d.5

2016-01-01

Abstract:We experimentally demonstrate de-magnification functionality of a hyperlens. The original patterns with a feature size of 300nm were scaled down to 190nm, which was smaller than half of the wavelength of the incident beam.
De-magnifying Hyperlens: Experimental Demonstration and Potential Applications (conference Presentation)

Natalia M. Litchinitser,Jingbo Sun,Tianboyu Xu

DOI: https://doi.org/10.1117/12.2238373

2016-01-01

Abstract:Hyperlens was already shown to facilitate the sub-diffraction imaging in the far-field by converting the sub-wavelength information carried by evanescent wave components into the propagating waves and magnifying those sub-wavelength details to the scales that can be resolved by conventional optical components. In this talk, we will discuss the case when the hyperlens is used in a reverse way, such that the incident light enters on the outer surface of the hyperlens and collected on the inner surface, the device may function as a de-magnifier. In particular, if a pattern of a large size (above the diffraction limit) is recorded on the outer surface serving as a mask, the sub-wavelength image can be achieved on the inner side of the hyperlens. While this idea was validated using numerical simulations, no experimental demonstration was reported to date. In this talk, we demonstrate de-magnifying hyperlens in laboratory experiments and discuss its potential applications. For example, one of such potential applications is sub-wavelength photolithography. Photolithography is the most widely used fabrication technique in integrated circuit industry. However, further decreasing the feature size becomes challenging, in particular, due to the diffraction limit. We experimentally show de-magnifying property of a spherical hyperlens composed of metal-dielectric multilayer structure with a Cr mask on its outer surface. A photoresist was spin-coated on the inner surface of the hyperlens to record the image. After exposure with 405nm light, the pattern on the mask was recorded in the photoresist on the inner surface of the hyperlens, demonstrating 1.6x de-magnification.
A hyperlens-embedded solid immersion lens for beam focusing beyond the diffraction limit

Guoxing Zheng,Ruiying Zhang,Song Li,Ping'an He,Hui Zhou,Yan Shi

DOI: https://doi.org/10.1109/LPT.2011.2158638

IF: 2.6

2011-01-01

IEEE Photonics Technology Letters

Abstract:A novel beam focusing device called hyperlens-embedded solid immersion lens (HESIL) is proposed in this letter. In the device, a hyperlens which supports propagating waves with very large wavenumbers is embedded into a super-hemispherical solid immersion lens and a super-resolution focusing spot can be formed at the bottom planar plane of the HESIL. The working principles and characteristics of th...
The Route to Visible Light Photolithography Using Hyperlens

Jingbo Sun,Natalia M. Litchinitser

DOI: https://doi.org/10.1088/2040-8986/aab033

IF: 2.1

2018-01-01

Journal of Optics

Abstract:Hyperlens, a curved hyperbolic metamaterials-based device, first emerged as a promising way of overcoming the diffraction limit for subwavelength imaging applications. In addition, it was recently realized that it can be used for sub-wavelength de-magnification. The magnification/de-magnification rate of the hyperlens is directly related to the thickness of the hyperbolic metamaterial. In this paper, we perform a systematic study on the de-magnification properties in different types of the hyperlens. We optimize the de-magnifying properties of a hyperlens to facilitate its potential applications for sub-wavelength photolithography. In order to achieve the required de-magnification properties, we developed a multi-step multi-layer deposition method to fabricate high-quality, thick hyperbolic metamaterials, advancing the state-of-the-art magnification and/or de-magnification properties of the hyperlens. The application of such a high de-magnification rate hyperlens in the photolithography technique may open up a new approach to the nanolithography using visible light, addressing growing demands for inexpensive, all-optical nanoscale pattern recording.
Focusing a beam beyond the diffraction limit using a hyperlens-based device

Zheng Guo-Xing,Zhang Rui-Ying,Song Li,He Ping-An,Hui Zhou

DOI: https://doi.org/10.1088/1674-1056/20/11/117802

2011-01-01

Chinese Physics B

Abstract:A super-focusing device composed of a focusing objective and a hyperlens is proposed to focus an incident plane wave into the deep subwavelength dimension. In the device, the objective converts the incident plane wave into a convergent one. The half cylindrical hyperlens can support high wave vector k modes propagating towards its core. So the convergent wave can be focused into an ultrasmall spot beyond the diffraction limit. The layout is proposed for the super-focusing device and its characteristics are investigated theoretically. Numerical simulations verify that the focused beams are confined in a spot with a diameter of 16.3 nm in the focal plane of the focusing objective with a numerical aperture of 0.6, which corresponds to a super-resolution spot of lambda(0)/23 (lambda(0) is the wavelength in vacuum). The simulations confirm the effectiveness of the proposed device.
Toward Practical, Subwavelength, Visible-Light Photolithography with Hyperlens.

Jingbo Sun,Natalia M. Litchinitser

DOI: https://doi.org/10.1021/acsnano.7b07185

IF: 17.1

2017-01-01

ACS Nano

Abstract:The future success of semiconductor technology relies on the continuing reduction of the feature size, allowing more components per chip and higher speed. Optical metamaterial-based hyperlens exhibit the ability for spatial pattern compression from the micro- to nanoscale, potentially addressing the ever-increasing demand of photolithograpy for inexpensive, all-optical nanoscale pattern recoding. Here, we demonstrate a photolithography system enabling a feature size of 80 nm using a 405 nm laser source. To realize such a system, we developed a fabrication method to obtain very thick hyperbolic metamaterial enabling a hyperlens with a very large demagnification rate of 3.75. Finally, we discuss several steps necessary to transform the proposed technique into a practical solution for the visible-light-based nanolithography. These include flattening of the inner surface of the hyperlens to increase the working area and integrating the proposed device into a conventional stepper system.
Novel Applications of Hyperlens

J. Sun,T. Xu,N. M. Litchinitser

DOI: https://doi.org/10.1364/fio.2017.jw3a.113

2017-01-01

Abstract:By exploiting strongly anisotropic optical properties of engineered nanostructures, we proposed and demonstrated several hyperlens-based devices that integrate super resolution properties into the practical applications.
Magnifying Lens Designed by Optical Conformal Mapping

Yichao Liu,Jichao Fu,Fei Sun,Sailing He

DOI: https://doi.org/10.1364/oe.412936

IF: 3.8

2020-01-01

Optics Express

Abstract:We proposed an alternative method to design a magnifying lens by optical conformal mapping. Different from previous hyperlens or superlens, the proposed lens needs no materials with negative or anisotropic refractive index. The lens has better photonic transporting efficiency than conventional a solid immersion lens due to impedance matching. The proposed lenses have many other advantages, such as broadband, low loss, and no need to redesign the sizes and material parameters when another magnifying ratio is required. Both numerical simulations and experimental demonstrations are implemented to verify the performance of the lens.
Planar Hyper-Lens with Uniform Pre-Designed Magnification Factor by Homogeneous Medium

Fei Sun,Jichao Fu,Jieliyue Sun,Yichao Liu,Yi Jin,Sailing He

DOI: https://doi.org/10.35848/1882-0786/abdca1

IF: 2.819

2021-01-01

Applied Physics Express

Abstract:A hyper-lens with planar object/image surfaces and uniform magnification factor is designed based on directional projecting property of optic-null medium (ONM). The proposed planar hyper-lens only requires one homogeneous anisotropic medium, i.e. ONM. We use metallic plates inside ϵ-near-zero medium to realize the proposed hyper-lens. 0.191λ 0 resolution is observed (0.238λ 0 can be clearly resolved) in experimental measurement, which consists very well with 3D numerical simulations and verifies the performance of the proposed planar hyper-lens. The planar hyper-lens with uniform pre-designed magnification factor may have some applications in super-resolution imaging technology.
Sub-diffraction-Limit Imaging in Optical Hyperlens

Hu Ji-Gang,Wang-Pei,Lu Yong-Hua,Ming Hai,Chen Chun-Chong,Chen Jun-Xue

DOI: https://doi.org/10.1088/0256-307x/25/12/071

2008-01-01

Abstract:Sub-diffraction-limit imaging in the optical hyperlens based on cylindrical metamaterials is studied. Some parameters of hyperlens, such as the dispersive relation and the divergence angle of imaging, are numerically analysed with the ray trajectory method and effective medium theory. The dependence of imaging properties on dielectric constant is discussed. As a result, a 0 degrees divergence angle is obtained for the best imaging effect. This work will be helpful for the design, structure fabrication and resoution improvement of the optical hyperlens.
Experimental Demonstration of A Non-Resonant Hyperlens in the Visible Spectral Range

Jingbo Sun,Mikhail I. Shalaev,Natalia M. Litchinitser

DOI: https://doi.org/10.1038/ncomms8201

IF: 16.6

2015-01-01

Nature Communications

Abstract:A metamaterial hyperlens offers a solution to overcome the diffraction limit by transforming evanescent waves responsible for imaging subwavelength features of an object into propagating waves. However, the first realizations of optical hyperlenses were limited by significant resonance-induced losses. Here we report the experimental demonstration of a non-resonant waveguide-coupled hyperlens operating in the visible wavelength range. A detailed investigation of various materials systems proves that a radial fan-shaped configuration is superior to the concentric layer-based configuration in that it relies on non-resonant negative dielectric response, and, as a result, enables low-loss performance in the visible range.
Designing Optimal Nanofocusing with a Gradient Hyperlens

Lian Shen,Ludmila J. Prokopeva,Hongsheng Chen,Alexander V. Kildishev

DOI: https://doi.org/10.1515/nanoph-2017-0054

IF: 7.5

2017-01-01

Nanophotonics

Abstract:We report the design of a high-throughput gradient hyperbolic lenslet built with real-life materials and capable of focusing a beam into a deep sub-wavelength spot of λ/23. This efficient design is achieved through high-order transformation optics and circular effective-medium theory (CEMT), which are used to engineer the radially varying anisotropic artificial material based on the thin alternating cylindrical metal and dielectric layers. The radial gradient of the effective anisotropic optical constants allows for matching the impedances at the input and output interfaces, drastically improving the throughput of the lenslet. However, it is the use of the zeroth-order CEMT that enables the practical realization of a gradient hyperlens with realistic materials. To illustrate the importance of using the CEMT versus the conventional planar effective-medium theory (PEMT) for cylindrical anisotropic systems, such as our hyperlens, both the CEMT and PEMT are adopted to design gradient hyperlenses with the same materials and order of elemental layers. The CEMT- and PEMT-based designs show similar performance if the number of metal-dielectric binary layers is sufficiently large (9+ pairs) and if the layers are sufficiently thin. However, for the manufacturable lenses with realistic numbers of layers (e.g. five pairs) and thicknesses, the performance of the CEMT design continues to be practical, whereas the PEMT-based design stops working altogether. The accurate design of transformation optics-based layered cylindrical devices enabled by CEMT allow for a new class of robustly manufacturable nanophotonic systems, even with relatively thick layers of real-life materials.
A Planar Hyperlens-Based Device for Super-Resolution Magnification Imaging in A Far Field

Jun Cui,Guoxing Zheng,Pingan He,Jiangnan Zhao,Jianping Yun,Jinling Yang,Song Li

DOI: https://doi.org/10.3788/col201412.s11601

IF: 2.56

2014-01-01

Chinese Optics Letters

Abstract:A planar-hyperlens-based imaging device is presented in this paper. Based on the structure of hyperbolic dispersion metamaterial and with the ability of collecting the evanescent waves from the object, the planar hyperlens can deliver and magnify the super-resolution details of a planar object to the extent that a traditional microscopic objective can resolve them. The super-resolution magnification imaging principle of the device was analyzed, and the relations of the imaging resolution and magnification with the structure parameters of the device were deduced. With careful design, the effectiveness of the device was confirmed in a series of numerical simulations.
A Hyperlens-Based Device for Nanoscale Focusing of Light

Jiangnan Zhao,Guoxing Zheng,Song Li,Hui Zhou,Yue Ma,Ruiying Zhang,Yan Shi,Ping'an He

DOI: https://doi.org/10.3788/col201210.042302

IF: 2.56

2012-01-01

Chinese Optics Letters

Abstract:To resolve the problem of missed evanescent waves in a beam focusing system, a hyperlens-based beam focusing device is proposed in this letter.This device can convert the evanescent waves into propagating waves, and then a super-resolution spot is formed at the center of the hyperlens.The working principle of the device is presented, and the way in which the material and structural parameters of the hyperlens affect the resolution and transmission is analyzed in detail.A multibeam focusing device is optimally designed, and the simulated results verify that a nanoscale spot with a diameter of 15.6 nm (corresponding to λ0/24, where λ0 is the working wavelength in vacuum) is achieved, which is far less than the diffraction limited resolution with a value of 625 nm (1.7λ0).The device is expected to find numerous applications in optical data storage and nano-photolithography, among others.
Centimeter-Sized Aplanatic Hybrid Diffractive-Refractive Lens

Jian-Guan Hua,Zhi-Yong Hu,Si-Jia Xu,Zhen-Nan Tian,Yan-Hao Yu,Qi-Dai Chen,Hong-Bo Sun

DOI: https://doi.org/10.1109/lpt.2018.2880013

IF: 2.6

2018-01-01

IEEE Photonics Technology Letters

Abstract:The design and the fabrication of a hybrid diffractive-refractive lens (HDRL) by the femtosecond laser direct writing technique at 343-nm wavelength are demonstrated. The diffractive part is a 10-mm-diameter aplanatic element inside a Z-cut sapphire wafer. The refractive part is a spherical planoconvex lens with a 9.3-mm radius of curvature. These two parts are jointly combined to constitute a diffractive-refractive singlet. The hybrid singlet realizes aplanatic action for the aspherical lens, which reduces the focal spot size of the spherical lens by 1/4. The modulation transfer function of the hybrid singlet shows a better imaging resolution performance than that of the single spherical lens. The diffractive elements inside the spherical lens also were made and not only further improve thermal stability of the optical system but also reduce the volume and weight. This HDRL can find important applications in diffractive reflective hybrid optics, super-resolution imaging, and integrated optics.
Non-Resonant Hyperlens In The Visible Range

jingbo sun,mikhail i shalaev,natalia m litchinitser

DOI: https://doi.org/10.1364/cleo_qels.2015.fm2c.6

2015-01-01

Abstract:A non-resonant hyperlens operating in the visible wavelength range is demonstrated experimentally. Non-resonant indefinite properties, enabling low-loss, broadband sub-wavelength imaging, were realized using a fan-like structure made using a combination of top-down and bottom-up techniques.
Ultra-thin, Zoom Capable, Flexible Metalenses with High Focusing Efficiency and Large Numerical Aperture

Yilin Shi,Hao Dai,Renjie Tang,Zequn Chen,Yalan Si,Hui Ma,Maoliang Wei,Ye Luo,Xingyi Li,Qing Zhao,Yuting Ye,Jialing Jian,Chunlei Sun,Kangjian Bao,Yaoguang Ma,Hongtao Lin,Lan Li

DOI: https://doi.org/10.1515/nanoph-2023-0561

IF: 7.5

2024-01-01

Nanophotonics

Abstract:The ever-growing demand for miniaturized optical systems presents a significant challenge in revolutionizing their core element – the varifocal lens. Recent advancements in ultra-thin, tunable metasurface optics have introduced new approaches to achieving zoom imaging. However, current varifocal metalens have faced challenges such as low focusing efficiency, limited tunability, and complicated designs. Here, we employ the high-contrast transmit arrays (HCTA) structures to design and fabricate a polarization-independent, single-layer flexible metalens that operates at a wavelength of 940 nm. Using a uniform stretching system, we characterized its optical performance to achieve over 60 % focusing efficiency within a 0 %–25 % stretch range, while the focal length changes align with theoretical predictions. Furthermore, our research also successfully demonstrated the capacity of a metalens with a numerical aperture (NA) of 0.5 to efficiently adjust imaging magnification within a 2× range, achieving imaging results that approach the diffraction limit. This research offers promising prospects for the practical use of compact and miniaturized optoelectronic devices in fields like photography, mixed reality, microscopy, and biomedical imaging.
Non-resonant hyperlens in the visible range (Presentation Recording)

natalia m litchinitser,jingbo sun,mikhail i shalaev

DOI: https://doi.org/10.1117/12.2190274

2015-01-01

Abstract:A metamaterial hyperlens offers a unique solution to overcome the diffraction limit by transforming evanescent waves responsible for imaging subwavelength features of an object into propagating waves. However, the first realizations of optical hyperlenses were limited by a narrow working bandwidth and significant resonance-induced loss. Here, we report the first experimental demonstration of a non-resonant waveguide-coupled hyperlens operating in the visible wavelength range that was fabricated using a combination of top-down and bottom-up fabrication approaches. A detailed investigation of various materials systems proves that a radial fan-shaped configuration is superior to the concentric layer-based configuration in that it relies on non-resonant negative dielectric response, and, as a result, enables broadband and low-loss performance in the visible range. While the majority of applications of a hyperlens is expected to be in optical frequency range, the challenge of fabricating non-resonant radial structures at optical frequencies has not been overcome until now.
Perfect Hyperlens

Tao Hou,Wen Xiao,Huanyang Chen

2024-07-28

Abstract:With the emergence of super-resolution lenses such as superlens and hyperlens, coupled with advancements in metamaterials, the diffraction limit of approximately half wavelength is no longer unbreakable. However, superlenses are easily affected by weak intrinsic losses and hyperlenses cannot achieve perfect imaging, significantly constraining their practical utility. To address these challenges, here we propose a perfect hyperlens based on the transformation optics. Importantly, perfect hyperlens is capable of self-focusing in geometrical optics while supporting propagating waves with exceptionally large wavenumbers, which endows it with key advantages such as ultra-high resolution, no aberration and strong robustness. Furthermore, we demonstrate the hyperbolic focusing performance in naturally in-plane hyperbolic polaritons of {\alpha}-MoO3 films numerically, which can be achieved by gradient thickness. The results greatly innovate the design principles of traditional imaging lens, providing many potentially significant applications for super-resolution real-time imaging, lithography, and sensing.

Optics
Hyper-lithography

Jingbo Sun,Tianboyu Xu,Natalia M. Litchinitser

2016-01-01

Abstract:The future success of integrated circuits (IC) technology relies on the continuing miniaturization of the feature size, allowing more components per chip and higher speed. Extreme anisotropy opens new opportunities for spatial pattern compression from the micro- to nano-scale. Such compression, enabling visible light-based lithographic patterning not restricted by the fundamental diffraction limit,if realized,may address the ever-increasing demand of IC industry for inexpensive, all-optical nanoscale lithography. By exploiting strongly anisotropic optical properties of engineered nanostructures, we realize the first experimental demonstration of hyperlens-based photolithography, facilitating optical patterning below the diffraction limit using a diffraction-limited mask. We demonstrate that the diffraction-limited features on a mask can be de-magnified to form the subwavelength patterns on the photoresist using visible light. This unique functionality,enabled by the hyperbolic dispersive properties of the medium combined with the cylindrical shape of the structure, opens a new approach to the future all-optical nanolithography.

High De-Magnification Hyperlens

Experimental Demonstration of the De-Magnifying Hyperlens

De-magnifying Hyperlens: Experimental Demonstration and Potential Applications (conference Presentation)

A hyperlens-embedded solid immersion lens for beam focusing beyond the diffraction limit

The Route to Visible Light Photolithography Using Hyperlens

Focusing a beam beyond the diffraction limit using a hyperlens-based device

Toward Practical, Subwavelength, Visible-Light Photolithography with Hyperlens.

Novel Applications of Hyperlens

Magnifying Lens Designed by Optical Conformal Mapping

Planar Hyper-Lens with Uniform Pre-Designed Magnification Factor by Homogeneous Medium

Sub-diffraction-Limit Imaging in Optical Hyperlens

Experimental Demonstration of A Non-Resonant Hyperlens in the Visible Spectral Range

Designing Optimal Nanofocusing with a Gradient Hyperlens

A Planar Hyperlens-Based Device for Super-Resolution Magnification Imaging in A Far Field

A Hyperlens-Based Device for Nanoscale Focusing of Light

Centimeter-Sized Aplanatic Hybrid Diffractive-Refractive Lens

Non-Resonant Hyperlens In The Visible Range

Ultra-thin, Zoom Capable, Flexible Metalenses with High Focusing Efficiency and Large Numerical Aperture

Non-resonant hyperlens in the visible range (Presentation Recording)

Perfect Hyperlens

Hyper-lithography