Novel Applications of Hyperlens

J. Sun,T. Xu,N. M. Litchinitser

DOI: https://doi.org/10.1364/fio.2017.jw3a.113

2017-01-01

Abstract:By exploiting strongly anisotropic optical properties of engineered nanostructures, we proposed and demonstrated several hyperlens-based devices that integrate super resolution properties into the practical applications.

What problem does this paper attempt to address?

Applications of Nanostructures in Wide-Field, Label-Free Super Resolution Microscopy

Xiaowei Liu,Chao Meng,Xuechu Xu,Mingwei Tang,Chenlei Pang,Qing Yang

DOI: https://doi.org/10.1088/1674-1056/27/11/118704

2018-01-01

Chinese Physics B

Abstract:Super resolution imaging capable of resolving details beyond the diffraction limit is highly desired in many scientific and application fields, including bio-medicine, nanomaterial science, and opto-electronic integration. Up to now, many different methods have been proposed, among which wide-field, label-free super resolution microscopy is indispensable due to its good applicability to diverse sample types, large field of view (FOV), and high imaging speed. In recent years, nanostructures have made a crucial contribution to the wide-field, label-free subdiffraction microscopy, with various working mechanisms and configuration designs. This review summarizes the recent applications of the nanostructures in the wide-field, label-free super resolution microscopy, with the emphasis on the designs of hyperlens with hyperbolic dispersion, microsphere with "nano-jets", and nanowire ring illumination microscopy based on spatial frequency shift effect. The bottlenecks of the current techniques and possible solutions are also discussed.
Far-field Optical Nanoscopy Via Visible Light

Xu Liu,Xiang Hao,Cuifang Kuang

DOI: https://doi.org/10.1364/n3.2013.nsu1c.2

2013-01-01

Abstract:Several newly proposed methods that can realize optical super-resolution imaging in the far-field are discussed in this paper, including their corresponding physical mechanisms, application scales, advantages, and limitations.
From microscopy to nanoscopy via visible light

Xiang Hao,Cuifang Kuang,Zhaotai Gu,Yifan Wang,Shuai Li,Yulong Ku,Yanghui Li,Jianhong Ge,Xu Liu

DOI: https://doi.org/10.1038/lsa.2013.64

2013-01-01

Abstract:The resolution of conventional optical equipment is always restricted by the diffraction limit, and improving on this was previously considered improbable. Optical super-resolution imaging, which has recently experienced rapid growth and attracted increasing global interest, will result in applications in many domains, benefiting fields such as biology, medicine and material research. This review discusses the contributions of different researchers who identified the diffractive barrier and attempted to realize optical super-resolution. This is followed by a personal viewpoint of the development of optical nanoscopy in recent decades and the road towards the next generation of optical nanoscopy.
A hyperlens-embedded solid immersion lens for beam focusing beyond the diffraction limit

Guoxing Zheng,Ruiying Zhang,Song Li,Ping'an He,Hui Zhou,Yan Shi

DOI: https://doi.org/10.1109/LPT.2011.2158638

IF: 2.6

2011-01-01

IEEE Photonics Technology Letters

Abstract:A novel beam focusing device called hyperlens-embedded solid immersion lens (HESIL) is proposed in this letter. In the device, a hyperlens which supports propagating waves with very large wavenumbers is embedded into a super-hemispherical solid immersion lens and a super-resolution focusing spot can be formed at the bottom planar plane of the HESIL. The working principles and characteristics of th...
De-magnifying Hyperlens: Experimental Demonstration and Potential Applications (conference Presentation)

Natalia M. Litchinitser,Jingbo Sun,Tianboyu Xu

DOI: https://doi.org/10.1117/12.2238373

2016-01-01

Abstract:Hyperlens was already shown to facilitate the sub-diffraction imaging in the far-field by converting the sub-wavelength information carried by evanescent wave components into the propagating waves and magnifying those sub-wavelength details to the scales that can be resolved by conventional optical components. In this talk, we will discuss the case when the hyperlens is used in a reverse way, such that the incident light enters on the outer surface of the hyperlens and collected on the inner surface, the device may function as a de-magnifier. In particular, if a pattern of a large size (above the diffraction limit) is recorded on the outer surface serving as a mask, the sub-wavelength image can be achieved on the inner side of the hyperlens. While this idea was validated using numerical simulations, no experimental demonstration was reported to date. In this talk, we demonstrate de-magnifying hyperlens in laboratory experiments and discuss its potential applications. For example, one of such potential applications is sub-wavelength photolithography. Photolithography is the most widely used fabrication technique in integrated circuit industry. However, further decreasing the feature size becomes challenging, in particular, due to the diffraction limit. We experimentally show de-magnifying property of a spherical hyperlens composed of metal-dielectric multilayer structure with a Cr mask on its outer surface. A photoresist was spin-coated on the inner surface of the hyperlens to record the image. After exposure with 405nm light, the pattern on the mask was recorded in the photoresist on the inner surface of the hyperlens, demonstrating 1.6x de-magnification.
Advanced Applications of Nonlinear Plasmonics

Ming Fang,Qun Ren,Jianwei You,Zhihao Lan,Zhixiang Huang,Wei E. I. Sha

DOI: https://doi.org/10.1007/978-3-030-87544-2_5

2022-01-01

Abstract:The nonlinear optical effects originating from the light-matter interaction under intense light excitations have enabled numerous novel applications, such as frequency conversion, all-optical modulation, and ultrafast optical switching. Recent years, the development of metamaterials, photonic crystals, and topological optics allow unconventional enhanced nonlinear effects that may potentially exceed traditional nonlinear materials. In this chapter, we discuss the concepts of nonlinear optical effects and introduce several nonlinear optical applications, including broadband terahertz source based on plasmonic metasurfaces, nonlinear Fano resonances, and nonlinear interaction of topological graphene plasmons.
The Route to Visible Light Photolithography Using Hyperlens

Jingbo Sun,Natalia M. Litchinitser

DOI: https://doi.org/10.1088/2040-8986/aab033

IF: 2.1

2018-01-01

Journal of Optics

Abstract:Hyperlens, a curved hyperbolic metamaterials-based device, first emerged as a promising way of overcoming the diffraction limit for subwavelength imaging applications. In addition, it was recently realized that it can be used for sub-wavelength de-magnification. The magnification/de-magnification rate of the hyperlens is directly related to the thickness of the hyperbolic metamaterial. In this paper, we perform a systematic study on the de-magnification properties in different types of the hyperlens. We optimize the de-magnifying properties of a hyperlens to facilitate its potential applications for sub-wavelength photolithography. In order to achieve the required de-magnification properties, we developed a multi-step multi-layer deposition method to fabricate high-quality, thick hyperbolic metamaterials, advancing the state-of-the-art magnification and/or de-magnification properties of the hyperlens. The application of such a high de-magnification rate hyperlens in the photolithography technique may open up a new approach to the nanolithography using visible light, addressing growing demands for inexpensive, all-optical nanoscale pattern recording.
Non-resonant hyperlens in the visible range (Presentation Recording)

natalia m litchinitser,jingbo sun,mikhail i shalaev

DOI: https://doi.org/10.1117/12.2190274

2015-01-01

Abstract:A metamaterial hyperlens offers a unique solution to overcome the diffraction limit by transforming evanescent waves responsible for imaging subwavelength features of an object into propagating waves. However, the first realizations of optical hyperlenses were limited by a narrow working bandwidth and significant resonance-induced loss. Here, we report the first experimental demonstration of a non-resonant waveguide-coupled hyperlens operating in the visible wavelength range that was fabricated using a combination of top-down and bottom-up fabrication approaches. A detailed investigation of various materials systems proves that a radial fan-shaped configuration is superior to the concentric layer-based configuration in that it relies on non-resonant negative dielectric response, and, as a result, enables broadband and low-loss performance in the visible range. While the majority of applications of a hyperlens is expected to be in optical frequency range, the challenge of fabricating non-resonant radial structures at optical frequencies has not been overcome until now.
Toward Practical, Subwavelength, Visible-Light Photolithography with Hyperlens.

Jingbo Sun,Natalia M. Litchinitser

DOI: https://doi.org/10.1021/acsnano.7b07185

IF: 17.1

2017-01-01

ACS Nano

Abstract:The future success of semiconductor technology relies on the continuing reduction of the feature size, allowing more components per chip and higher speed. Optical metamaterial-based hyperlens exhibit the ability for spatial pattern compression from the micro- to nanoscale, potentially addressing the ever-increasing demand of photolithograpy for inexpensive, all-optical nanoscale pattern recoding. Here, we demonstrate a photolithography system enabling a feature size of 80 nm using a 405 nm laser source. To realize such a system, we developed a fabrication method to obtain very thick hyperbolic metamaterial enabling a hyperlens with a very large demagnification rate of 3.75. Finally, we discuss several steps necessary to transform the proposed technique into a practical solution for the visible-light-based nanolithography. These include flattening of the inner surface of the hyperlens to increase the working area and integrating the proposed device into a conventional stepper system.
Hyper-lithography

Jingbo Sun,Tianboyu Xu,Natalia M. Litchinitser

2016-01-01

Abstract:The future success of integrated circuits (IC) technology relies on the continuing miniaturization of the feature size, allowing more components per chip and higher speed. Extreme anisotropy opens new opportunities for spatial pattern compression from the micro- to nano-scale. Such compression, enabling visible light-based lithographic patterning not restricted by the fundamental diffraction limit,if realized,may address the ever-increasing demand of IC industry for inexpensive, all-optical nanoscale lithography. By exploiting strongly anisotropic optical properties of engineered nanostructures, we realize the first experimental demonstration of hyperlens-based photolithography, facilitating optical patterning below the diffraction limit using a diffraction-limited mask. We demonstrate that the diffraction-limited features on a mask can be de-magnified to form the subwavelength patterns on the photoresist using visible light. This unique functionality,enabled by the hyperbolic dispersive properties of the medium combined with the cylindrical shape of the structure, opens a new approach to the future all-optical nanolithography.
The Dynamics of Nanoscale Superresolution Imaging with the Superlens

Ravi Sadananda Hegde,Zsolt Szabo,Yew Li Hor,Yasaman Kiasat,Er Ping Li,Wolfgang J. R. Hoefer

DOI: https://doi.org/10.1109/tmtt.2011.2160084

IF: 4.3

2011-01-01

IEEE Transactions on Microwave Theory and Techniques

Abstract:The theoretical foundations of superresolution imaging of nanoscale objects with the Veselago/Pendry Superlens are reviewed from a microwave engineering viewpoint. Insights into the dynamic response of the Superlens, gained from both theoretical and numerical studies, are presented. The results provide new perspectives on the physics of evanescent field transmission and the key factors that limit the resolution of such a lens even in the absence of losses and nonlinearities. The proposed spectral waveguide model greatly simplifies the analysis-both theoretical and numerical-as well as the design of superresolution imaging systems. Full-wave electromagnetic simulations of evanescent wave transmission by the lens, performed with the waveguide model in both time and frequency domains, are validated against theoretical and computational predictions found in the literature.
High De-Magnification Hyperlens

Jingbo Sun,Natalia M. Litchinitser

DOI: https://doi.org/10.1364/cleo_qels.2018.fm3j.4

2018-01-01

Abstract:We design and fabricate a hyperlens with a large demagnification of 3.75. We experimentally demonstrate such hyperlens' capability to compress the original patterns with feature size of 300nm down to 80nm using 405nm light.
Novel Optical Lithography Using Silver Superlens

Haiyan Qin,Xuan Li,Su Shen

DOI: https://doi.org/10.3788/col20080602.0149

IF: 2.56

2008-01-01

Chinese Optics Letters

Abstract:>This work has demonstrated that with silver superlens,the resolution of conventional optical lithography can be improved significantly.Experimental and simulative results are given to verify the facts that the resolution and the pattern fidelity are sensitive to the contact tightness between layers.
Photon Nanojet Lens: Design, Fabrication and Characterization

Chen Xu,Sichao Zhang,Jinhai Shao,Bing-Rui Lu,Reyad Mehfuz,Stacey Drakeley,Fumin Huang,Yifang Chen

DOI: https://doi.org/10.1088/0957-4484/27/16/165302

IF: 3.5

2016-01-01

Nanotechnology

Abstract:In this paper, a novel nanolens with super resolution, based on the photon nanojet effect through dielectric nanostructures in visible wavelengths, is proposed. The nanolens is made from plastic SU-8, consisting of parallel semi-cylinders in an array. This paper focuses on the lens designed by numerical simulation with the finite-difference time domain method and nanofabrication of the lens by grayscale electron beam lithography combined with a casting/bonding/lift-off transfer process. Monte Carlo simulation for injected charge distribution and development modeling was applied to define the resultant 3D profile in PMMA as the template for the lens shape. After the casting/bonding/lift-off process, the fabricated nanolens in SU-8 has the desired lens shape, very close to that of PMMA, indicating that the pattern transfer process developed in this work can be reliably applied not only for the fabrication of the lens but also for other 3D nanopatterns in general. The light distribution through the lens near its surface was initially characterized by a scanning near-field optical microscope, showing a well defined focusing image of designed grating lines. Such focusing function supports the great prospects of developing a novel nanolithography based on the photon nanojet effect.
Perfect Hyperlens

Tao Hou,Wen Xiao,Huanyang Chen

2024-07-28

Abstract:With the emergence of super-resolution lenses such as superlens and hyperlens, coupled with advancements in metamaterials, the diffraction limit of approximately half wavelength is no longer unbreakable. However, superlenses are easily affected by weak intrinsic losses and hyperlenses cannot achieve perfect imaging, significantly constraining their practical utility. To address these challenges, here we propose a perfect hyperlens based on the transformation optics. Importantly, perfect hyperlens is capable of self-focusing in geometrical optics while supporting propagating waves with exceptionally large wavenumbers, which endows it with key advantages such as ultra-high resolution, no aberration and strong robustness. Furthermore, we demonstrate the hyperbolic focusing performance in naturally in-plane hyperbolic polaritons of {\alpha}-MoO3 films numerically, which can be achieved by gradient thickness. The results greatly innovate the design principles of traditional imaging lens, providing many potentially significant applications for super-resolution real-time imaging, lithography, and sensing.

Optics
Experimental Demonstration of A Non-Resonant Hyperlens in the Visible Spectral Range

Jingbo Sun,Mikhail I. Shalaev,Natalia M. Litchinitser

DOI: https://doi.org/10.1038/ncomms8201

IF: 16.6

2015-01-01

Nature Communications

Abstract:A metamaterial hyperlens offers a solution to overcome the diffraction limit by transforming evanescent waves responsible for imaging subwavelength features of an object into propagating waves. However, the first realizations of optical hyperlenses were limited by significant resonance-induced losses. Here we report the experimental demonstration of a non-resonant waveguide-coupled hyperlens operating in the visible wavelength range. A detailed investigation of various materials systems proves that a radial fan-shaped configuration is superior to the concentric layer-based configuration in that it relies on non-resonant negative dielectric response, and, as a result, enables low-loss performance in the visible range.
Non-Resonant Hyperlens In The Visible Range

jingbo sun,mikhail i shalaev,natalia m litchinitser

DOI: https://doi.org/10.1364/cleo_qels.2015.fm2c.6

2015-01-01

Abstract:A non-resonant hyperlens operating in the visible wavelength range is demonstrated experimentally. Non-resonant indefinite properties, enabling low-loss, broadband sub-wavelength imaging, were realized using a fan-like structure made using a combination of top-down and bottom-up techniques.
Experimental Demonstration of the De-Magnifying Hyperlens

Jingbo Sun,Tianboyu Xu,Natalia M. Litchinitser

DOI: https://doi.org/10.1364/cleo_qels.2016.fth4d.5

2016-01-01

Abstract:We experimentally demonstrate de-magnification functionality of a hyperlens. The original patterns with a feature size of 300nm were scaled down to 190nm, which was smaller than half of the wavelength of the incident beam.
Near Field Enhancement in Silver Nanoantenna-Superlens Systems

Zhengtong Liu,Erping Li,Vladimir M. Shalaev,Alexander V. Kildishev

DOI: https://doi.org/10.1063/1.4732793

IF: 4

2012-01-01

Applied Physics Letters

Abstract:We demonstrate near field enhancement generation in silver nanoantenna-superlens systems via numerical modeling. Using near-field interference and global optimization algorithms, we can design nanoantenna-superlens systems with mismatched permittivities, whose performance can match those with matched permittivities. The systems studied here may find broad applications in the fields of sensing, such as field-enhanced fluorescence and surface-enhanced Raman scattering, and the methodology used here can be applied to the designing and optimization of other devices, such as two-dimensional near field focusing lens.
Designing Optimal Nanofocusing with a Gradient Hyperlens

Lian Shen,Ludmila J. Prokopeva,Hongsheng Chen,Alexander V. Kildishev

DOI: https://doi.org/10.1515/nanoph-2017-0054

IF: 7.5

2017-01-01

Nanophotonics

Abstract:We report the design of a high-throughput gradient hyperbolic lenslet built with real-life materials and capable of focusing a beam into a deep sub-wavelength spot of λ/23. This efficient design is achieved through high-order transformation optics and circular effective-medium theory (CEMT), which are used to engineer the radially varying anisotropic artificial material based on the thin alternating cylindrical metal and dielectric layers. The radial gradient of the effective anisotropic optical constants allows for matching the impedances at the input and output interfaces, drastically improving the throughput of the lenslet. However, it is the use of the zeroth-order CEMT that enables the practical realization of a gradient hyperlens with realistic materials. To illustrate the importance of using the CEMT versus the conventional planar effective-medium theory (PEMT) for cylindrical anisotropic systems, such as our hyperlens, both the CEMT and PEMT are adopted to design gradient hyperlenses with the same materials and order of elemental layers. The CEMT- and PEMT-based designs show similar performance if the number of metal-dielectric binary layers is sufficiently large (9+ pairs) and if the layers are sufficiently thin. However, for the manufacturable lenses with realistic numbers of layers (e.g. five pairs) and thicknesses, the performance of the CEMT design continues to be practical, whereas the PEMT-based design stops working altogether. The accurate design of transformation optics-based layered cylindrical devices enabled by CEMT allow for a new class of robustly manufacturable nanophotonic systems, even with relatively thick layers of real-life materials.

Novel Applications of Hyperlens

Applications of Nanostructures in Wide-Field, Label-Free Super Resolution Microscopy

Far-field Optical Nanoscopy Via Visible Light

From microscopy to nanoscopy via visible light

A hyperlens-embedded solid immersion lens for beam focusing beyond the diffraction limit

De-magnifying Hyperlens: Experimental Demonstration and Potential Applications (conference Presentation)

Advanced Applications of Nonlinear Plasmonics

The Route to Visible Light Photolithography Using Hyperlens

Non-resonant hyperlens in the visible range (Presentation Recording)

Toward Practical, Subwavelength, Visible-Light Photolithography with Hyperlens.

Hyper-lithography

The Dynamics of Nanoscale Superresolution Imaging with the Superlens

High De-Magnification Hyperlens

Novel Optical Lithography Using Silver Superlens

Photon Nanojet Lens: Design, Fabrication and Characterization

Perfect Hyperlens

Experimental Demonstration of A Non-Resonant Hyperlens in the Visible Spectral Range

Non-Resonant Hyperlens In The Visible Range

Experimental Demonstration of the De-Magnifying Hyperlens

Near Field Enhancement in Silver Nanoantenna-Superlens Systems

Designing Optimal Nanofocusing with a Gradient Hyperlens