Experimental Demonstration of the De-Magnifying Hyperlens

Jingbo Sun,Tianboyu Xu,Natalia M. Litchinitser

DOI: https://doi.org/10.1364/cleo_qels.2016.fth4d.5

2016-01-01

Abstract:We experimentally demonstrate de-magnification functionality of a hyperlens. The original patterns with a feature size of 300nm were scaled down to 190nm, which was smaller than half of the wavelength of the incident beam.

What problem does this paper attempt to address?

High De-Magnification Hyperlens

Jingbo Sun,Natalia M. Litchinitser

DOI: https://doi.org/10.1364/cleo_qels.2018.fm3j.4

2018-01-01

Abstract:We design and fabricate a hyperlens with a large demagnification of 3.75. We experimentally demonstrate such hyperlens' capability to compress the original patterns with feature size of 300nm down to 80nm using 405nm light.
De-magnifying Hyperlens: Experimental Demonstration and Potential Applications (conference Presentation)

Natalia M. Litchinitser,Jingbo Sun,Tianboyu Xu

DOI: https://doi.org/10.1117/12.2238373

2016-01-01

Abstract:Hyperlens was already shown to facilitate the sub-diffraction imaging in the far-field by converting the sub-wavelength information carried by evanescent wave components into the propagating waves and magnifying those sub-wavelength details to the scales that can be resolved by conventional optical components. In this talk, we will discuss the case when the hyperlens is used in a reverse way, such that the incident light enters on the outer surface of the hyperlens and collected on the inner surface, the device may function as a de-magnifier. In particular, if a pattern of a large size (above the diffraction limit) is recorded on the outer surface serving as a mask, the sub-wavelength image can be achieved on the inner side of the hyperlens. While this idea was validated using numerical simulations, no experimental demonstration was reported to date. In this talk, we demonstrate de-magnifying hyperlens in laboratory experiments and discuss its potential applications. For example, one of such potential applications is sub-wavelength photolithography. Photolithography is the most widely used fabrication technique in integrated circuit industry. However, further decreasing the feature size becomes challenging, in particular, due to the diffraction limit. We experimentally show de-magnifying property of a spherical hyperlens composed of metal-dielectric multilayer structure with a Cr mask on its outer surface. A photoresist was spin-coated on the inner surface of the hyperlens to record the image. After exposure with 405nm light, the pattern on the mask was recorded in the photoresist on the inner surface of the hyperlens, demonstrating 1.6x de-magnification.
Microsphere Based Microscope with Optical Super-Resolution Capability

Xiang Hao,Cuifang Kuang,Xu Liu,Haijun Zhang,Yanghui Li

DOI: https://doi.org/10.1063/1.3662010

IF: 4

2011-01-01

Applied Physics Letters

Abstract:We experimentally demonstrated that the microsphere can discern the details of the object whose sizes are below the conventional diffractive limit and such super-resolution capability can be reinforced if semi-immersing the corresponding microspheres in liquid droplet, producing a sharper contrast and a comparatively smaller magnification factor. The microsphere is considered as a channel that connects the near-field evanescent wave and the transmission one in far field. A conjecture based on this is proposed to explain the mechanism of super-resolution and the corresponding phenomenon.
Optical super-resolution microscope based on microsphere

Xu Liu,Xiang Hao

DOI: https://doi.org/10.1117/12.920355

2012-01-01

Abstract:We experimentally demonstrated that the microsphere on the top surface of the sample can enhance the imaging capability of microscope, and possible to arrive a resolution below the conventional diffractive limit. The principle of the super-resolution was discussed, and mainly due to the transformation of surface wave to propagation wave. The mechanism of super-resolution and the corresponding phenomenon are presented in the paper.
Demonstration of Microfiber Knot Laser

Xiaoshun Jiang,Qing Yang,Guillaume Vienne,Yuhang Li,Limin Tong,Junjie Zhang,Lili Hu

DOI: https://doi.org/10.1063/1.2359439

IF: 4

2006-01-01

Applied Physics Letters

Abstract:The authors demonstrate a 1.5μm wavelength microfiber laser formed by tightening a doped microfiber into a knot in air. The 2-mm-diameter knot, assembled using a 3.8-μm-diameter microfiber that is directly drawn from Er:Yb-doped phosphate glass, serves as both active medium and resonating cavity for lasing. Single-longitudinal-mode laser with threshold of about 5mW and output power higher than 8μW is obtained. Their initial results suggest a simple approach to highly compact lasers based on doped microscale optical fibers.
Experimental Verification of the Far-Field Subwavelength Focusing with Multiple Concentric Nanorings

Tingting Wang,Xiao Wang,Cuifang Kuang,Xiang Hao,Xu Liu

DOI: https://doi.org/10.1063/1.3524825

IF: 4

2010-01-01

Applied Physics Letters

Abstract:A structure for subwavelength focusing at optical frequencies based on multiple concentric air nanorings was proposed. Using the coherent illumination light at 532 nm, a sequence of two-dimensional intensity distribution was obtained. We experimentally demonstrated the smallest focal spot observed at a distance of 2.8 μm away from the output surface of the sample with the full width at half maximum of ∼320 nm (0.6λ) and a depth of focus of ∼2.4 μm (4.51λ).
Experimental Demonstration of A Non-Resonant Hyperlens in the Visible Spectral Range

Jingbo Sun,Mikhail I. Shalaev,Natalia M. Litchinitser

DOI: https://doi.org/10.1038/ncomms8201

IF: 16.6

2015-01-01

Nature Communications

Abstract:A metamaterial hyperlens offers a solution to overcome the diffraction limit by transforming evanescent waves responsible for imaging subwavelength features of an object into propagating waves. However, the first realizations of optical hyperlenses were limited by significant resonance-induced losses. Here we report the experimental demonstration of a non-resonant waveguide-coupled hyperlens operating in the visible wavelength range. A detailed investigation of various materials systems proves that a radial fan-shaped configuration is superior to the concentric layer-based configuration in that it relies on non-resonant negative dielectric response, and, as a result, enables low-loss performance in the visible range.
Focusing a beam beyond the diffraction limit using a hyperlens-based device

Zheng Guo-Xing,Zhang Rui-Ying,Song Li,He Ping-An,Hui Zhou

DOI: https://doi.org/10.1088/1674-1056/20/11/117802

2011-01-01

Chinese Physics B

Abstract:A super-focusing device composed of a focusing objective and a hyperlens is proposed to focus an incident plane wave into the deep subwavelength dimension. In the device, the objective converts the incident plane wave into a convergent one. The half cylindrical hyperlens can support high wave vector k modes propagating towards its core. So the convergent wave can be focused into an ultrasmall spot beyond the diffraction limit. The layout is proposed for the super-focusing device and its characteristics are investigated theoretically. Numerical simulations verify that the focused beams are confined in a spot with a diameter of 16.3 nm in the focal plane of the focusing objective with a numerical aperture of 0.6, which corresponds to a super-resolution spot of lambda(0)/23 (lambda(0) is the wavelength in vacuum). The simulations confirm the effectiveness of the proposed device.
A hyperlens-embedded solid immersion lens for beam focusing beyond the diffraction limit

Guoxing Zheng,Ruiying Zhang,Song Li,Ping'an He,Hui Zhou,Yan Shi

DOI: https://doi.org/10.1109/LPT.2011.2158638

IF: 2.6

2011-01-01

IEEE Photonics Technology Letters

Abstract:A novel beam focusing device called hyperlens-embedded solid immersion lens (HESIL) is proposed in this letter. In the device, a hyperlens which supports propagating waves with very large wavenumbers is embedded into a super-hemispherical solid immersion lens and a super-resolution focusing spot can be formed at the bottom planar plane of the HESIL. The working principles and characteristics of th...
The Route to Visible Light Photolithography Using Hyperlens

Jingbo Sun,Natalia M. Litchinitser

DOI: https://doi.org/10.1088/2040-8986/aab033

IF: 2.1

2018-01-01

Journal of Optics

Abstract:Hyperlens, a curved hyperbolic metamaterials-based device, first emerged as a promising way of overcoming the diffraction limit for subwavelength imaging applications. In addition, it was recently realized that it can be used for sub-wavelength de-magnification. The magnification/de-magnification rate of the hyperlens is directly related to the thickness of the hyperbolic metamaterial. In this paper, we perform a systematic study on the de-magnification properties in different types of the hyperlens. We optimize the de-magnifying properties of a hyperlens to facilitate its potential applications for sub-wavelength photolithography. In order to achieve the required de-magnification properties, we developed a multi-step multi-layer deposition method to fabricate high-quality, thick hyperbolic metamaterials, advancing the state-of-the-art magnification and/or de-magnification properties of the hyperlens. The application of such a high de-magnification rate hyperlens in the photolithography technique may open up a new approach to the nanolithography using visible light, addressing growing demands for inexpensive, all-optical nanoscale pattern recording.
Novel Applications of Hyperlens

J. Sun,T. Xu,N. M. Litchinitser

DOI: https://doi.org/10.1364/fio.2017.jw3a.113

2017-01-01

Abstract:By exploiting strongly anisotropic optical properties of engineered nanostructures, we proposed and demonstrated several hyperlens-based devices that integrate super resolution properties into the practical applications.
Toward Practical, Subwavelength, Visible-Light Photolithography with Hyperlens.

Jingbo Sun,Natalia M. Litchinitser

DOI: https://doi.org/10.1021/acsnano.7b07185

IF: 17.1

2017-01-01

ACS Nano

Abstract:The future success of semiconductor technology relies on the continuing reduction of the feature size, allowing more components per chip and higher speed. Optical metamaterial-based hyperlens exhibit the ability for spatial pattern compression from the micro- to nanoscale, potentially addressing the ever-increasing demand of photolithograpy for inexpensive, all-optical nanoscale pattern recoding. Here, we demonstrate a photolithography system enabling a feature size of 80 nm using a 405 nm laser source. To realize such a system, we developed a fabrication method to obtain very thick hyperbolic metamaterial enabling a hyperlens with a very large demagnification rate of 3.75. Finally, we discuss several steps necessary to transform the proposed technique into a practical solution for the visible-light-based nanolithography. These include flattening of the inner surface of the hyperlens to increase the working area and integrating the proposed device into a conventional stepper system.
Non-Resonant Hyperlens In The Visible Range

jingbo sun,mikhail i shalaev,natalia m litchinitser

DOI: https://doi.org/10.1364/cleo_qels.2015.fm2c.6

2015-01-01

Abstract:A non-resonant hyperlens operating in the visible wavelength range is demonstrated experimentally. Non-resonant indefinite properties, enabling low-loss, broadband sub-wavelength imaging, were realized using a fan-like structure made using a combination of top-down and bottom-up techniques.
Image Magnification in Lensless Holographic Projection Using Double-Sampling Fresnel Diffraction

Weidong Qu,Huarong Gu,Hao Zhang,Qiaofeng Tan

DOI: https://doi.org/10.1364/ao.54.010018

IF: 1.9

2015-01-01

Applied Optics

Abstract:Since the diffraction angle is limited by the spatial resolution of the spatial light modulator (SLM), the size of the optical image of the lensless holographic projection with a SLM is very small. Using a divergent spherical beam to illuminate a SLM is an effective method to physically increase the projection angle; nevertheless, the sampling ranges of the existing Fresnel diffraction algorithms with fast Fourier transform keep unchanged. In this paper, a double-sampling Fresnel diffraction algorithm to enlarge the sampling range is proposed when using a divergent spherical beam to illuminate a SLM, and the magnification of the optical image is realized in lensless holographic projection. The hologram can be easily optimized by the Gerschberg-Saxton algorithm. Simulation and experimental results with enlarged optical image are presented successfully.
A Hyperlens-Based Device for Nanoscale Focusing of Light

Jiangnan Zhao,Guoxing Zheng,Song Li,Hui Zhou,Yue Ma,Ruiying Zhang,Yan Shi,Ping'an He

DOI: https://doi.org/10.3788/col201210.042302

IF: 2.56

2012-01-01

Chinese Optics Letters

Abstract:To resolve the problem of missed evanescent waves in a beam focusing system, a hyperlens-based beam focusing device is proposed in this letter.This device can convert the evanescent waves into propagating waves, and then a super-resolution spot is formed at the center of the hyperlens.The working principle of the device is presented, and the way in which the material and structural parameters of the hyperlens affect the resolution and transmission is analyzed in detail.A multibeam focusing device is optimally designed, and the simulated results verify that a nanoscale spot with a diameter of 15.6 nm (corresponding to λ0/24, where λ0 is the working wavelength in vacuum) is achieved, which is far less than the diffraction limited resolution with a value of 625 nm (1.7λ0).The device is expected to find numerous applications in optical data storage and nano-photolithography, among others.
Dielectric Optical-Controllable Magnifying Lens by Nonlinear Negative Refraction

Jianjun Cao,Ce Shang,Yuanlin Zheng,Yaming Feng,Xianfeng Chen,Xiaogan Liang,Wenjie Wan

DOI: https://doi.org/10.1038/srep11892

IF: 4.6

2015-01-01

Scientific Reports

Abstract:A simple optical lens plays an important role for exploring the microscopic world in science and technology by refracting light with tailored spatially varying refractive indices. Recent advancements in nanotechnology enable novel lenses, such as, superlens and hyperlens, with sub-wavelength resolution capabilities by specially designed materials’ refractive indices with meta-materials and transformation optics. However, these artificially nano- or micro-engineered lenses usually suffer high losses from metals and are highly demanding in fabrication. Here, we experimentally demonstrate, for the first time, a nonlinear dielectric magnifying lens using negative refraction by degenerate four-wave mixing in a plano-concave glass slide, obtaining magnified images. Moreover, we transform a nonlinear flat lens into a magnifying lens by introducing transformation optics into the nonlinear regime, achieving an all-optical controllable lensing effect through nonlinear wave mixing, which may have many potential applications in microscopy and imaging science.
Sub-diffraction-Limit Imaging in Optical Hyperlens

Hu Ji-Gang,Wang-Pei,Lu Yong-Hua,Ming Hai,Chen Chun-Chong,Chen Jun-Xue

DOI: https://doi.org/10.1088/0256-307x/25/12/071

2008-01-01

Abstract:Sub-diffraction-limit imaging in the optical hyperlens based on cylindrical metamaterials is studied. Some parameters of hyperlens, such as the dispersive relation and the divergence angle of imaging, are numerically analysed with the ray trajectory method and effective medium theory. The dependence of imaging properties on dielectric constant is discussed. As a result, a 0 degrees divergence angle is obtained for the best imaging effect. This work will be helpful for the design, structure fabrication and resoution improvement of the optical hyperlens.
Magnification of Optical Image in Holography Projection Using Lensless Fresnel Holography

Jianshe Ma,Ping Su,Feipeng Xia,Zhenbo Ren,Tong Liu

DOI: https://doi.org/10.1117/1.oe.51.8.085801

IF: 1.3

2012-01-01

Optical Engineering

Abstract:A digital micro-mirror device (DMD) acting as a real-time hologram is an emerging technology in dynamic holographic projection. This paper presents a lensless image magnification method in DMD holography by using a Fresnel hologram. By analyzing the diffraction order distribution in the image plane of a hologram produced by DMD, we find the factors that limit the size of the magnified image. We perform a lensless magnification experiment that shows good magnified images in accordance with the numerical results. Finally, we discuss methods to eliminate longitudinal error and chromatic aberration in three-dimensional (3-D) and color projection, respectively, and present a 3-D image reconstruction result that shows lensless magnification of a 3-D image without distortion. It is believed that this technique can be used in future real-time holographic projection based on digital light processing technology. (C) 2012 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.OE.51.8.085801]
Non-resonant hyperlens in the visible range (Presentation Recording)

natalia m litchinitser,jingbo sun,mikhail i shalaev

DOI: https://doi.org/10.1117/12.2190274

2015-01-01

Abstract:A metamaterial hyperlens offers a unique solution to overcome the diffraction limit by transforming evanescent waves responsible for imaging subwavelength features of an object into propagating waves. However, the first realizations of optical hyperlenses were limited by a narrow working bandwidth and significant resonance-induced loss. Here, we report the first experimental demonstration of a non-resonant waveguide-coupled hyperlens operating in the visible wavelength range that was fabricated using a combination of top-down and bottom-up fabrication approaches. A detailed investigation of various materials systems proves that a radial fan-shaped configuration is superior to the concentric layer-based configuration in that it relies on non-resonant negative dielectric response, and, as a result, enables broadband and low-loss performance in the visible range. While the majority of applications of a hyperlens is expected to be in optical frequency range, the challenge of fabricating non-resonant radial structures at optical frequencies has not been overcome until now.
Hyper-lithography

Jingbo Sun,Tianboyu Xu,Natalia M. Litchinitser

2016-01-01

Abstract:The future success of integrated circuits (IC) technology relies on the continuing miniaturization of the feature size, allowing more components per chip and higher speed. Extreme anisotropy opens new opportunities for spatial pattern compression from the micro- to nano-scale. Such compression, enabling visible light-based lithographic patterning not restricted by the fundamental diffraction limit,if realized,may address the ever-increasing demand of IC industry for inexpensive, all-optical nanoscale lithography. By exploiting strongly anisotropic optical properties of engineered nanostructures, we realize the first experimental demonstration of hyperlens-based photolithography, facilitating optical patterning below the diffraction limit using a diffraction-limited mask. We demonstrate that the diffraction-limited features on a mask can be de-magnified to form the subwavelength patterns on the photoresist using visible light. This unique functionality,enabled by the hyperbolic dispersive properties of the medium combined with the cylindrical shape of the structure, opens a new approach to the future all-optical nanolithography.

Experimental Demonstration of the De-Magnifying Hyperlens

High De-Magnification Hyperlens

De-magnifying Hyperlens: Experimental Demonstration and Potential Applications (conference Presentation)

Microsphere Based Microscope with Optical Super-Resolution Capability

Optical super-resolution microscope based on microsphere

Demonstration of Microfiber Knot Laser

Experimental Verification of the Far-Field Subwavelength Focusing with Multiple Concentric Nanorings

Experimental Demonstration of A Non-Resonant Hyperlens in the Visible Spectral Range

Focusing a beam beyond the diffraction limit using a hyperlens-based device

A hyperlens-embedded solid immersion lens for beam focusing beyond the diffraction limit

The Route to Visible Light Photolithography Using Hyperlens

Novel Applications of Hyperlens

Toward Practical, Subwavelength, Visible-Light Photolithography with Hyperlens.

Non-Resonant Hyperlens In The Visible Range

Image Magnification in Lensless Holographic Projection Using Double-Sampling Fresnel Diffraction

A Hyperlens-Based Device for Nanoscale Focusing of Light

Dielectric Optical-Controllable Magnifying Lens by Nonlinear Negative Refraction

Sub-diffraction-Limit Imaging in Optical Hyperlens

Magnification of Optical Image in Holography Projection Using Lensless Fresnel Holography

Non-resonant hyperlens in the visible range (Presentation Recording)

Hyper-lithography