Novel Optical Lithography Using Silver Superlens

Haiyan Qin,Xuan Li,Su Shen
DOI: https://doi.org/10.3788/col20080602.0149
IF: 2.56
2008-01-01
Chinese Optics Letters
Abstract:>This work has demonstrated that with silver superlens,the resolution of conventional optical lithography can be improved significantly.Experimental and simulative results are given to verify the facts that the resolution and the pattern fidelity are sensitive to the contact tightness between layers.
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