Efficient Fabrication of Vertical Carbon Nanotube Array Cold Cathode Using Laser Cutting

Chuyang Liao,Jiupeng Li,Xiaoyu Qin,Qi Bo,Baohong Li,Shaozhi Deng,Yu Zhang
DOI: https://doi.org/10.1109/ivnc52431.2021.9600770
2021-01-01
Abstract:A vertical carbon nanotube (CNT) sheet array was fabricated using a laser cutting method which has the advantages of simple, efficient, clean and low cost. A CNT sheet array with 3 μm sheet width, 20 μm sheet height, 20 μm spacing and 3.5 mm2 overall size can emit a current of 50 mA, a corresponding current density of 1.43 A /cm2 in pulse field emission. The uniform emission site distribution showed that the electrostatic shielding effect can be eliminated in the array pattern. The performance of the CNT sheet array was promising for cold cathode device. The laser cutting method opens up a new way to fabricate high quality field emitter in simple process.
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