High Throughput Laser Assisted Near-Field Nanomanufacturing

Heng Pan,David Hwang,Seung H. Ko,Costas P. Grigoropoulos
DOI: https://doi.org/10.2351/1.5061492
2009-01-01
Abstract:Near field nanomanufacturing can break the diffraction limitation and generate features at nanoscale. However, current near field nanomanufacturing suffers from the low throughput and hinders its practical applications. In this paper, we are presenting a new approach of adopting a near-field lens array and generate an array of features with nanoscale resolution.
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