Abstract:We report on the design, fabrication and testing of three types of coupling structures for hybrid chalcogenide glass Ge23Sb7S70-Silicon (GeSbS-Si) photonic integrated circuit platforms. The first type is a fully etched GeSbS grating coupler defined directly in the GeSbS film. Coupling losses of 5.3 dB and waveguide-to-waveguide back-reflections of 3.4% were measured at a wavelength of 1553 nm. Hybrid GeSbS-to-Si butt couplers and adiabatic couplers transmitting light between GeSbS and Si single-mode waveguides were further developed. The hybrid butt couplers (HBCs) feature coupling losses of 2.7 dB and 9.2% back-reflection. The hybrid adiabatic couplers (HACs) exhibit coupling losses of 0.7 dB and negligible back-reflection. Both HBCs and HACs have passbands exceeding the 100 nm measurement range of the test setup. GeSbS grating couplers and GeSbS-to-Si waveguide couplers can be co-fabricated in the same process flow, providing, for example, a means to first couple high optical power levels required for nonlinear signal processing directly into GeSbS waveguides and to later transition into Si waveguides after attenuation of the pump. Moreover, GeSbS waveguides and HBC transitions have been fabricated on post-processed silicon photonics chips obtained from a commercially available foundry service, with a previously deposited 2 μm thick top waveguide cladding. This fabrication protocol demonstrates the compatibility of the developed integration scheme with standard silicon photonics technology with a complete back-end-of-line process.

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Demonstration of Stimulated Brillouin Scattering in Low-Loss Chalcogenide Waveguides

Hybrid Chalcogenide‐Germanosilicate Waveguides for High Performance Stimulated Brillouin Scattering Applications

Low-loss Photonic Device in Ge-Sb-S Chalcogenide Glass.

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Low-loss compact chalcogenide microresonators for efficient stimulated Brillouin lasers

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Nonlinear Optical Properties of Integrated GeSbS Chalcogenide Waveguides

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Stimulated Brillouin scattering in tellurite-covered silicon nitride waveguides

Broadband Couplers for Hybrid Silicon-Chalcogenide Glass Photonic Integrated Circuits

On-Chip Stimulated Brillouin Scattering via Surface Acoustic Waves

High‐Gain Waveguide Amplifiers in Ge25Sb10S65 Photonics Heterogeneous Integration with Erbium‐Doped Al2O3 Thin Films

Stimulated Brillouin Scattering in AlGaAs on Insulator Waveguides

Stimulated Brillouin scattering in a non-suspended ultra-low-loss thick-SOI platform

Effects of Shallow Suspension in Low-Loss Waveguide-Integrated Chalcogenide Microdisk Resonators

Mitigating waveguide loss in Ge-Sb-Se chalcogenide glass photonics

High-net-gain erbium-doped hybrid waveguide amplifiers on chalcogenide photonic platform

Third Order Nonlinear Properties of GeSbS Chalcogenide Waveguides