Abstract:Microresonator frequency combs (microcombs) are enabling new applications in frequency synthesis and metrology from high-speed laser ranging to coherent optical communications. One critical parameter that dictates the performance of the microcomb is the optical quality factor (Q) of the microresonator. Microresonators fabricated in planar structures such as silicon nitride (Si3N4) allow for dispersion engineering and the possibility to monolithically integrate the microcomb with other photonic devices. However, the relatively large refractive index contrast and the tight optical confinement required for dispersion engineering make it challenging to attain Si3N4 microresonators with Qs > 10 000 000 using standard subtractive processing methods. In this work, we achieve ultra-smooth Si3N4 microresonators featuring mean intrinsic Qs around 11 million. The cross-section geometry can be precisely engineered in the telecommunications band to achieve either normal or anomalous dispersion, and we demonstrate the generation of mode-locked dark-pulse Kerr combs as well as soliton microcombs. Such high-Qs allow us to generate soliton microcombs with photodetectable repetition rates, demonstrated here for the first time in Si3N4 microresonators fabricated using a subtractive processing method. These results enhance the possibilities for co-integration of microcombs with high-performance photonic devices, such as narrow-linewidth external-cavity diode lasers, ultra-narrow filters and demultiplexers.

Precise Control of Micro-Rod Resonator Free Spectral Range Via Iterative Laser Annealing

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

On-Chip Electro-Optic Tuning of A Lithium Niobate Microresonator with Integrated In-Plane Microelectrodes

Repetition rate tuning of soliton in microrod resonators

Repetition Rate Tuning and Locking of Solitons in a Microrod Resonator.

High-quality-factor Optical Microresonators Fabricated on Lithium Niobate Thin Film with an Electro-Optical Tuning Range Spanning over One Free Spectral Range [Invited]

Stress-released Si3N4 microresonator fabrication process for optical frequency comb

High-Q Si3N4 microresonators based on a subtractive processing for Kerr nonlinear optics

Controllable Excitation of Whispering Gallery Mode Micro-Rod Resonator

Controllable Two-Dimensional Kerr and Raman–Kerr Frequency Combs in Microbottle Resonators with Selectable Dispersion

Selective linewidth control in a micro-resonator with a resonant interferometric coupler

Fabrication of a microtoroidal resonator with picometer precise resonant wavelength.

Arbitrary Function Resonance Tuner of the Optical Microcavity with Sub-Mhz Resolution.

Vernier Spectrometer Using Counterpropagating Soliton Microcombs

Photonic dissipation control for Kerr soliton generation in strongly Raman-active media

Ultra-precise, sub-picometer tunable free spectral range in a parabolic microresonator induced by optical fiber bending

Perfect Soliton Crystals in the High-Q Microrod Resonator

Tuning Kerr-Soliton Frequency Combs to Atomic Resonances

Foundry manufacturing of octave-spanning microcombs

Tuning the resonant frequency of resonators using molecular surface self-assembly approach.

Orthogonal dual-soliton in a fiber microresonator for force sensing