Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Fabrication of Single-Mode Circular Optofluidic Waveguides in Fused Silica Using Femtosecond Laser Microfabrication

Low-loss optofluidic waveguides in fused silica enabled by spatially shaped femtosecond laser assisted etching combined with carbon dioxide laser irradiation

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Ultra-high-Q Microcavities Fabricated on Fused Silica Chips by Three-Dimensional Femtosecond Laser Microfabrication

Direct Fabrication of Homogeneous Microfluidic Channels Embedded in Fused Silica Using a Femtosecond Laser

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Fabrication of silicon-on-glass waveguides

Manufacture of Three-Dimensional Optofluidic Spot-Size Converters in Fused Silica Using Hybrid Laser Microfabrication

Multiple Waveguides Fabricated Simultaneously by Femtosecond Laser Pulses Inside Fused Silica Glasses Using a Multiple Foci Approach

Single-step fabrication of surface waveguides in fused silica with few-cycle laser pulses

Fabrication of Microchannels on Silica Glass by Femtosecond Laser Multi-Scan： from Surface Generation Mechanism to Morphology Control

Investigation on Femtosecond Laser-Assisted Microfabrication in Silica Glasses

Fabrication of millimeter-scale deep microchannels in fused silica by femtosecond laser filamentation effect

Femtosecond Laser Engraved 2D Tunable Optofluidic Liquid Core/Air Cladding Channel Waveguides on PDMS

Fabrication of beam shapers in the bulk of fused silica by femtosecond laser pulses.

Fabrication of fluidic submicron-channels by pulsed laser-induced buckling of SiOx films on fused silica

Transverse writing of three-dimensional tubular optical waveguides in glass with a slit-shaped femtosecond laser beam

Transmission Performance of 90°-Bend Optical Waveguides Fabricated in Fused Silica by Femtosecond Laser Inscription.

Fabrication Of Microfluidic Devices In Silica Glass By Water-Assisted Ablation With Femtosecond Laser Pulses

Transverse writing of three-dimensional tubular optical waveguides in glass with slit-shaped femtosecond laser beams

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing