Abstract:High precision fabrication of nanostructure is a primary limitingfactor to devices miniaturization. Electron beam is expected to promotethe process on the accuracy of fabrication. For instance, electronbeam lithography has been developed to replace optical lithographyto transfer patterns and has produced line width on the order of 10 nmor smaller. Furthermore, electrons can directly interact with thesample to cause changes in structure and properties, which is expectedto be used for fabrication of specialized nanostructures with nanometereven sub-nanometer precision. Transmission electron microscopy (TEM) has become an indispensabletool for the study of the interaction between energetic electronsand sample. A large number of experimental studies have been carriedout inside TEM where electron beam can not only be used for atomicresolution imaging but also for irradiation. These studies are conductiveto understanding phenomena induced by irradiation in essence, whichare the theoretical and experimental basis for controllable manipulationvia electron irradiation. However, TEM images are parallel projectionsof three-dimensional (3D) structures onto the image plane, which tremendouslyincreases the difficulty of atomic-structure analysis. Two-dimensional (2D) layered materials (graphene, hexagon boronnitride, transition metal dichalcogenides and so on) emerged and boomedin the past decade, which provide ideal systems to study electronirradiation effects on matter. As mono- or bi-atomic sheets, theiratomic structures are accessible to image directly with atomic resolutionin the advent of spherical aberration corrected TEM. The lateral resolutionin TEM image, which is smaller than the bond length, leaves almostno room for uncertain interpretation. Meanwhile, the reconstructionof the lattice occurs in the 2D plane can be seen without any projectionartifacts. Besides, structural changes, as they are generated underirradiation with energetic electrons, can be monitored in real time.On this basis, novel mechanisms of lattice reconstruction, which didnot appear in other materials, have been discovered, such as transformationsbetween hexagons and pentagon-heptagon pairs by in-plane 90˚rotation of C–C bonds in graphene sheet. In addition to a detailed understanding of radiation-induced structureevolution and their influence on the properties of 2D sheet, the designof new structures has become feasible. Especially, electron beamsinside modern TEM can be focused onto spots less than 1 A,which allows use of the beam as tweezers to manipulate materials evenat the single atom level. In this way, sub-nanometer quasi one dimensionalstructures, such as nanowires, nanoribbons, nanotubes and atomic chains,have been fabricated in 2D nanosystems. Sub-5 nm nanoporescan also be sculpted in 2D sheets, which is particularly suitablefor chemical and biological molecule detection. Besides, 2D materialscan serve as substrates to study radiation-induced structural evolutionof substance on their surface. This review gives a brief summary of our current knowledge aboutelectron irradiation in the aspect of elastic scattering and inelasticscattering, and a summary of the most recent experimental resultson in situ irradiation in 2D layered material systems,including atomic structural evolution under electron irradiation andcontrollable fabrication of nanostructures by TEM.

Nanoscale Material Design and Processing by Electron Beam Energy

Atomic Investigation on the Facet‐Dependent Melting of Ceramic Nanostructures Via in Situ Electron Irradiation

Precisely-controlled Fabrication of Single ZnO Nanoemitter Arrays and Their Possible Application in Low Energy Parallel Electron Beam Exposure.

Control of Nanoscale Interphase Boundaries by an Electron Beam

Atomic resolution nanofabrication and dynamic characterization.

A Review of Recent Applications of Ion Beam Techniques on Nanomaterial Surface Modification: Design of Nanostructures and Energy Harvesting

Composition Control of Electron Beam Induced Nanodeposits by Surface Pretreatment and Beam Focusing

Controllable Fabrication of Hollow In2O3 Nanoparticles by Electron Beam Irradiation

Electron Beam Irradiation-Induced Deoxidation and Atomic Flattening on the Copper Surface.

Nano electron source fabricated by beam-induced deposition and its unique feature

Atomic-Scale Localized Thinning And Reconstruction Of Two-Dimensional Ws2 Layers Through In Situ Transmission Electron Microscopy/Scanning Transmission Electron Microscopy

Electron-beam induced synthesis of nanostructures: a review

In-situ study of electron irradiation on two-dimensional layered materials

In Situ Domain-Confined Epitaxial Regrowth of Individual Nanoparticle: Implications for Nanofabrication

Behavior and bonding mechanisms of aluminum nanoparticles by electron beam irradiation

Formation of a New Electric Material: Fullerene / Metal Polycrystalline Film

Electron-Beam Manipulated Nanoscale Reaction

Surface Modification of Metals Irradiated by Intense Nanosecond Pulsed Electron Beam

In Situ Interfacial Manipulation of Metastable States Between Nucleation and Decomposition of Single Bismuth Nanoparticle

Engineering and modifying two-dimensional materials by electron beams

Exploring the fabrication and transfer mechanism of metallic nanostructures on carbon nanomembranes via focused electron beam induced processing