Abstract:This paper presents a theoretical and experimental investigation into the electrostatic coupling mecha-nism between different nonlinear modes inside a single resonator. Nonlinear intermodal coupling allows an arbitrary mode to be used as a modulator for the resonance of the coupled mode, presenting an efficient method to tune the frequency of a specific vibration mode. Here, a capacitive micromechanical resonator is developed, in which different modes exhibit different nonlinear characteristics. Inside this resonator, interactions between different nonlinear modes induced by electrostatic fields are observed and accurately modeled. It demonstrates that resonance modulation control can be achieved by activating the coupled modes based on the dispersive parametric coupling effect. Meanwhile, the resonance modulation is jointly determined by coupled modes, providing a theoretical basis and approach for modal manipulation technol-ogy. The dispersive coupling between intrinsic modes enables the probe resonance to be tuned by nearly 100 times its bandwidth, and its range and polarity can also be controlled by selecting the resonance of the pump mode. It is proven that resonance modulation control induced by the modal coupling effect can efficiently tune the resonator's resonance frequency over a wide range, which presents a promising voltage-frequency transduction scheme with high sensitivity and low noise for the precision instrument. Its pull range exhibits a great potential of more than 20% as a voltage-controlled oscillator and can be customized to satisfy different requirements, paving the way toward advanced mechanics.

A Wide Range Frequency Coherent Modulation Control Based on Modal Coupling Effect in MEMS Resonators

Dispersive Resonance Modulation Based on the Mode-Coupling Effect in a Capacitive Micromechanical Resonator

Modal Coupling Effect in a Novel Nonlinear Micromechanical Resonator

On Weakly Coupled Resonant MEMS Transducers Operating in the Modal Overlap Regime

A Review on Coupled Bulk Acoustic Wave MEMS Resonators

Frequency Comb with High Tunability Via Coexistence State Excitation and Cavity Modulation in Microelectromechanical Resonators

A New Scheme to Enhance/Decrease Sensitivity of a Mems Resonator Using Parametric Modulation

Dynamic Modulation of Modal Coupling in Microelectromechanical Gyroscopic Ring Resonators

Significant tuning of internal mode coupling in doubly clamped MEMS beam resonators by thermal effect

Multi-harmonic phononic frequency comb generation in capacitive CMOS-MEMS resonators

Multi-modal resonance measurement capable of discerning and visualizing effects due to excitation schemes in mems resonator

Energy Transfer Control of Mode Cooling Induced by Capacitive Nonlinear Coupling in MEMS Resonator

Adaptive Frequency-stabilization of MEMS Oscillators Using Mode Coupling

MEMS oscillator based on vibration mode coupling and control method

Continuously Tunable Time Delay and Advance in Coupling-Modulated Microring Resonators

Tunable Mechanical-Mode Coupling Based on Nanobeam-Double Optomechanical Cavities

Mode Coupling and Locking of a Π-shaped Cantilever Resonator Using Laser-Induced Asymmetric Modulation

Widely-Tunable MEMS Phononic Frequency Combs by Multistage Bifurcations under a Single-Tone Excitation

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Parametric resonance of multi-frequency excited MEMS based on homotopy analysis method

Mechanically Coupled Single-Crystal Silicon MEMS Resonators for TCF Manipulation