Abstract:Intermodal coupling has been demonstrated to be a promising mechanism for the development of advanced micro/nanoelectromechanical devices. However, strong mode coupling remains a key challenge limiting the practical application of intermodal coupling. Furthermore, the insight into physical mechanisms underlying mode coupling and the capability to quantitatively tune the mode coupling is also limited. Here, we experimentally and theoretically demonstrate the significant tunability of mode coupling by using the thermal tuning effect, yet in an asymmetric doubly-clamped MEMS beam resonator, enabling various coupling strength to be implemented for practical applications. In this system, two out-of-plane vibrational modes are mechanically coupled through displacement-induced tension, and their mode coupling strength arises from both hardening and softening nonlinearities of the two modes, thus allowing for the tuning of mode coupling strength by thermally enhancing the softening nonlinearity of the MEMS beam. Our results demonstrate a feasible approach to tune the mode coupling and offer insights into fundamental mechanism of mode coupling in MEMS beam resonators, paving the way for the development of MEMS resonators with enhanced performance and application-specific tunability.

Energy Transfer Control of Mode Cooling Induced by Capacitive Nonlinear Coupling in MEMS Resonator

MEMS gyroscopes parametric excitation control scheme with constant resonant frequency

Characteristics of phase delay in capacitive pick-off circuits for MEMS resonators

Significant tuning of internal mode coupling in doubly clamped MEMS beam resonators by thermal effect

Cooling a Mechanical Resonator Via Coupling to a Tunable Double Quantum Dot

Dynamic Cooling Of A Mechanical Resonator In The Strong Coupling Regime

Electrostatic nonlinear dispersive parametric mode interaction

Cooling of optomechanical system by coherent feedback

Dynamic Dissipative Cooling of a Mechanical Resonator in Strong Coupling Optomechanics.

Cooling of Mechanical Resonator in a Hybrid Intracavity Squeezing Optomechanical System.

Adaptive Frequency-stabilization of MEMS Oscillators Using Mode Coupling

Cooling of a micro-mechanical resonator by the back-action of Lorentz force

Simultaneous cooling and synchronization of the mechanical and the radio-frequency resonators via voltage modulation

Sympathetic feedback cooling in the optomechanical system consisting of two coupled cantilevers

Simultaneous Cooling of Coupled Mechanical Resonators in Cavity Optomechanics

Dynamic Dissipative Synchronized Cooling of Two Mechanical Resonators in Strong Coupling Optomechanics

Temperature-frequency Drift Suppression Via Electrostatic Stiffness Softening in MEMS Resonator with Weakened Duffing Nonlinearity

Optimal Limits Of Cavity Optomechanical Cooling In The Strong-Coupling Regime

Cooling Mechanical Oscillators by Coherent Control

Cooling a Nanomechanical Resonator by a Triple Quantum Dot

Nonreciprocal ground-state cooling of multiple mechanical resonators