Method for preparing indium tin oxide (ITO) thin film with flexible polyester (PET) substrate by magnetron sputtering

Wu Tang,Xuesong Yin,Xiaolong Weng,Longjiang Deng,Liang Chen
2012-01-01
Abstract:The invention relates to a method for preparing an indium tin oxide (ITO) thin film with a flexible polyester (PET) substrate by magnetron sputtering, relating to the technology of electronic materials. The method comprises the following steps of: (1) preprocessing a substrate: removing dirt on the surface of the substrate; (2) preparing before sputtering: putting the cleaned substrate in vacuum environment; (3) presputtering: presputtering in argon environment; and (4) sputtering and coating films: performing low temperature sputtering and film coating on the organic substrate after presputtering, and cooling the substrate in the process of coating films, wherein the sputtering time of each time is controlled to be within 30 min, and continuously sputtering at the interval of between 10 min and 25 min until the thickness of the thin film reaches a preset value. The ITO thin film prepared by the technology has the advantages of high transmissivity, low resistivity and simple preparation method in a range of visible light wave bands.
What problem does this paper attempt to address?