Abstract:Ultra-short pulse laser interaction with diamond materials has attracted extensive interest in micro- and nano-machining, especially for the fabrication of micro tools, because of the straightforward method and high precision. Thanks to the development of chemical vapor deposition (CVD) technology, high-quality CVD diamonds are employed in more varieties of tools as performance-enhancing coatings. The purpose of the experiments reported here was to explore the machinability of CVD diamond coating under the irradiation of femtosecond (fs) pulsed laser. The factor-control approach was adopted to investigate the influence of scanning speed, single pulse energy and repetition rate on the surface quality and carbon phase transition of CVD diamond coating. The material removal rate and surface roughness were evaluated. The interaction mechanism of scanning speed, single pulse energy, and repetition rate were discussed, and the fs laser ablation threshold of CVD diamond coating was calculated. It was demonstrated that two ablation mechanisms (weak and intensive) were in existence as evidenced by the distinct surface morphologies induced under different processing conditions. A strong dependence on the variation of scanning speed and pulse energy is identified in the examination of surface roughness and removal rate. Lorentzian–Gaussian deconvolution of Raman spectra illustrates that fs laser irradiation yields a strong modification effect on the coating and release the compressive stress in it. Furthermore, a newly defined parameter referring to the fs laser energies applied to unit volume was introduced to depict the degree of ablation and the Taguchi method was used to figure out the significance of different parameters. The ablation threshold of CVD diamond coating at the effective pulses of 90 is calculated to be 0.138 J/cm2.

A STUDY OF FEMTOSECOND LASER POLISHING OF CVD NANOPOLYCRYSTALLINE DIAMOND FILMS

Study on Femtosecond Laser Processing Characteristics of Nano-Crystalline CVD Diamond Coating

Optical Quality Laser Polishing of CVD Diamond by UV Pulsed Laser Irradiation

Nanosecond pulsed laser-processing of CVD diamond

Cryogenic assisted femtosecond laser ablation of polycrystalline diamond

Femtosecond and nanosecond laser polishing of rough polycrystalline diamond

Sub-nanoscale Polishing of Single Crystal Diamond(100) and the Chemical Behavior of Nanoparticles During the Polishing Process

Roughness Control in the Processing of 2-Inch Polycrystalline Diamond Films on 4H-Sic Wafers

Investigation into Polishing Process of CVD Diamond Films

EXPERIMENTAL INVESTIGATION OF THE SURFACE TOPOGRAPHY IN TERMS OF PROCESS PARAMETERS DURING PICOSECOND LASER MACHINING OF POLYCRYSTALLINE DIAMOND

Experimental Parametric Investigation of Nanosecond Laser-Induced Surface Graphitization of Nano-Crystalline Diamond

A Study of Ultraprecision Mechanical Polishing of Single-Crystal Silicon with Laser Nano-Structured Diamond Abrasive by Molecular Dynamics Simulation

Ablation Threshold Measurement and Chemical Modification of UV Nanosecond Laser Micromachining of Polycrystalline Diamond

Influence of Femtosecond Laser-Induced Periodic Surface Structures on the Tribological Performance of CVD Nano-Crystalline Diamond Films

A Systematic Study of the Factors Affecting the Surface Quality of Chemically Vapor-Deposited Diamond during Chemical and Mechanical Polishing

Study On Micromachining Of Polycrystalline Diamond By Uv Nanosecond Laser

Analysis of the machining performance and surface integrity in laser milling of polycrystalline diamonds

Surface modeling and component analysis of picosecond laser ablation of CVD diamond

Ultrashort Pulsed Laser Micromachining of Polycrystalline Diamond

Influence of the grain size of CVD diamond on the thermal conductivity, material removal depth and surface roughness in nanosecond laser machining

Surface microstructuring of single crystalline diamond based on the accumulated energy homogenization in the nanosecond pulsed laser ablation