A New MD Statistical Noise Improvement Algorithm for Dose Effect Simulation

施小康,石浩,于民,黄如,张兴
DOI: https://doi.org/10.3321/j.issn:0479-8023.2004.03.012
2004-01-01
Abstract:A new method for the acceleration of MD(molecular dynamics)simulation of ion implantation into crystalline targets is presented.The READE(Rare Even t Algorithm with Dose Effect)method can well speed up the MD simulation of ion implantation with dose effect.As a result,the time required performing a simulation with high precision and dose effect is drastically reduced.And many detai ls producing statistical noise in simulation is involved in the READE and help it to be more reasonable and reliable.
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