Study of the Preservation of Helium Implanted in Nanocrystal Titanium Film by Enhanced Proton Backscattering Spectrometry

Yan-min DUAN,Man-tian LIU,Xing-gui LONG,Xing-chun WU,Shun-zhong LUO,Dong-jian LIU,Ying WU,Si-xiao ZHENG,Ning LIU,Zhu AN
DOI: https://doi.org/10.3969/j.issn.0490-6756.2005.01.023
2005-01-01
Abstract:The preservation dose of helium implanted in several nanocrystal titanium films deposited on Mo substrates is analyzed by enhanced proton backscattering spctrometry. The result demonstrates that the implanted helium can be preserved for a long time in nanocrystal titanium films and its release speed is affected by the ion implantation energy, the thickness of nanocrystal titanium films and the helium concentration in nanocrystal titanium films. The choice of parameters in Ar-He gas discharge method for helium implantation is very important, which has a crucial role on the helium implantation into nanocrystal titanium films.
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