Transmission electron microscopy investigation of 1-D semiconductor nanostructures

俞大鹏
DOI: https://doi.org/10.3969/j.issn.1000-6281.2002.03.007
2002-01-01
Abstract:In this paper, we summarize some of the recent progress on investigation of semiconductor nanowires in which the electron microscopy plays a very important role. A diverse variety of semiconductor nanowires (Si, GaN, ZnO, and Ga2O3) was synthesized using laser ablation, or by physical vapor deposition (PVD) approaches. The morphology and microstructures of the nanowires were characterized by SEM and TEM. The unidirectional growth and size effect of the nanowires were investigated using HREM. The chemical composition and structure of one peculiar kind of composite nanocables were determined with the analysis via HAADF(high angle annular dart field) and PEELs(parallel electron energy loss spectrometry), it is impossible to be resolved by conventional X ray diffractionmethod.
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