Influence of film thickness on the microstructure and magnetic properties of M-type barium ferrite films

郭辉莉,杨艳,柴治,孙科,李强,余忠,蒋晓娜,兰中文
DOI: https://doi.org/10.3969/j.issn.1001-3830.2015.06.006
2015-01-01
Abstract:M-type barium ferrite (BaM) films with different thicknesses have been deposited on the sapphire substrates by radio frequency (RF) magnetron sputtering technique. Influence of film thickness on the microstructure and magnetic properties of BaM films has been investigated. The structure and magnetic properties of films were characterized by X-ray diffractometer (XRD), field emission scanning electron microscope (FESEM) and vibrating sample magneto- meter (VSM), respectively. XRD data indicates that all samples exhibit(00l)diffraction peak, showing good c-axis orientation. For thickness ranging from 40nm to 90nm, BaM films mainly form lamellar grains with good c-axis orientation. However, apparent needle-like grains appear as the thickness is larger than 90nm. When the thickness is 190nm, the grain size for part of the needle-like grains even achieves the magnitude order of micron. VSM test results show that as the thickness of sample increases, the saturation magnetization of the film sample reduces, the coercivity and the remanence ratio perpendicular to the film plane decreases. When the thickness changes from 40nm to 90nm, BaM films obtain the largest coercivity and remanence ratio in the direction perpendicular to the film plane and show good magnetic anisotropy.
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