Effect of Si doping on structure and properties of CrAlN nanometer hard coatings

TAI Qing-an,LIU Qi,GUO Zhen-xing,WANG Jin,MA Da-yan,SONG Zhong-xiao
DOI: https://doi.org/10.13289/j.issn.1009-6264.2017-0204
2017-01-01
Abstract:CrAlN and CrAlSiN nanocomposite coatings were prepared on V-4E tool steel surface by vacuum cathodic arc ion plating.Mechanical properties,tribological properties and microstructure of the coatings were analyzed by means of scratches,tool microscope,microhardness tester,ball mill,SEM,EDS analysis,XRD,TEM and XPS.The results show that compared with the CrAlN coating,the doping of Si in the CrAlSiN coating can refine the grains,improve the hardness and wear resistance of the coating and optimize the binding level of the film matrix.The cubic phase CrN in the CrAlSiN coating exhibits a transformation from (111) preferential orientation to (200) preferential orientation,the grain size decreases significantly,and the phase structure of the coating shows nanocomposite hybrid frame structure embedded by amorphous Si3N4.
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