Simulation and Experimental Study of Non-Contact Piezoelectric Micromotor

YANG Bin,LIU Jing-quan,CHEN Di,ZHOU Guang-hua,CAI Bing-chu
DOI: https://doi.org/10.3321/j.issn:1004-924x.2005.02.008
2005-01-01
Optics and Precision Engineering
Abstract:A new non-contact piezoelectric micromotor was presented,based on four-sector and eight-sector excited by electric signals. The mode analysis of the stator was carried out to compute the natural frequency and the corresponding vibration mode by finite element method. The frequency sweep and the vibration mode test were done with a laser Doppler vibrometer. It is shown that the optimum driving frequencies of the stators divided into four-sector and eight-sector are 34.4 kHz and 46.3 kHz, and the corresponding vibration mode were B_(21) mode and B_(22), respectively. It is found that the finite element simulation results were in good agreement with experiment. The output characteristics of micromotor were tested. The conclusion is that the revolution speed of the optimum driving frequency of eight-sector is about double than four-sector for three blades and six blades rotors. These demonstrate that the increase of the sector number of stator can not only change the optimum driving frequency, but also increase the revolution speed of rotors obviously. When the difference between A and B phase is changed between 90°and 270°, the direction of the traveling wave along circumferential direction is shifted, so the rotation direction of rotor is also changed. the experiment shows that the non-contact piezoelectric micromotor offers identical performance to different rotation directions.
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