A Non-contact Piezoelectric Micromotor Using SU-8 Resist Rotor

Bin YANG,Jing-quan LIU,Guang-hua ZHOU,Di CHEN,Jin-ya ZHANG,Bing-chu CAI
2005-01-01
Abstract:A non-contact piezoelectric micromotor has been fabricated and the resonant frequency of the stator is measured by HP4191A impedance/gain-phase analyzer. The fabrication process of SU-8 resist rotor is described in detail. The revolution speeds of different shapes and diameters rotor at variable frequency or variable voltage are measured by revolution meter. The revolution speed of optimal rotor with three blades, radius of 6 mm and blade width of 6 mm, is 3 569 r/min. The initial and maximum electric voltages are 8 V and 24 V, respectively.
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