Effects of Gas Flow Rates on Fused Silica Glass

Yaosong Huang,Lili Zheng,Zhuyin Ren,Hui Zhang
DOI: https://doi.org/10.11715/rskxjs.R201503059
2015-01-01
Abstract:The refractive index homogeneity of large-sized fused silica glass has great impact on its optical character-istics.In this paper,a numerical study on synthesis of fused silica glass by SiCl4 hydrolysis deposition is per-formed.The effects of the equivalence ratio of H2 to O2 and the mass ratio of carrier gas to SiCl4 on temperature pro-file and species concentration distributions are investigated,together with their potential impact on the homogeneity of refractive index of large-sized fused silica glass.It is found that the temperature profile in radial direction exhibits a high-low-high M-shape profile,and the increase of equivalence ratio of H2 to O2 results in a shorter axial preheating region.A long flame length and a broad high-temperature region can be obtained when the equivalence ratio is 1.0, but the residue of OH concentration and its gradient increase on the deposition surface of fused silica glass ingot, which will lead to the high inhomogeneity in refractive index.Small equivalence ratio is beneficial to refractive index homogeneity due to its small temperature gradient and OH concentration gradient,but the overall flame temperature and silica production are reduced.Additionally,increasing the mass ratio of carrier gas O2 to SiCl4 will reduce the temperature gradient and silica production,and concurrently increase the OH concentration gradient.Its effects on the refractive index homogeneity need to be considered comprehensively.
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