The Cluster Source and Its Application

赵子强
DOI: https://doi.org/10.3321/j.issn:0253-3219.2002.09.006
2002-01-01
Abstract:A cluster machine which can produce cluster of different size by adjusting evaporation or sputtering parameter is introduced here. It is shown the novel properties of those cluster films and its applications in optical and magnetic films.
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