Application of Clusters to the Fabrication of Silicon Nanostructures

Katrin Seeger,Richard E. Palmer
DOI: https://doi.org/10.1007/978-3-642-57169-5_9
2000-01-01
Abstract:The field of cluster physics is a relatively young area of science which developed because of the wide range of interesting properties which clusters exhibit. After a period in which these fundamental properties were studied intensively, the possible technological application areas of clusters are now the subject of increased attention. It is difficult to present a complete picture of all these areas, so this chapter aims first to give a brief overview of some applications of clusters in nanotechnology and then, by way of illustration, to discuss in more detail some processes in which metal clusters are utilised to fabricate silicon nanostructures.
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