Combination of RBS and SIMS Methods in the Analysis of Trace Elements in Thick DLC Sample

Cai GUO,Tao ZHENG,Kun LIU,Jiang-yan YANG,Ji-ting TIAN,Rui NIE,Hong-ji MA,Fu-rong DING
DOI: https://doi.org/10.3969/j.issn.0258-0934.2014.02.008
2014-01-01
Abstract:Rutherford Back Scattering spectroscopy ( RBS) can be used to analyze the distribution and content of heavy elements in foils .Moreover , for thick samples , to identify the elements and determine the distribution is quite difficult.Secondary Ion Mass Spectrometry (SIMS) with a high resolution can be a supplement to the RBS analysis.In the lab of 2 1.7MV tandem accelerator in Peking University , these two analysis methods are com-bined to analyze trace elements in thick diamond like carbon (DLC) material.
What problem does this paper attempt to address?