Simultaneous Analysis of Light Elements Using Non-Rutherford Helium Backscattering

ZY ZHOU,YY ZHOU,Y ZHANG,WD XU,GQ ZHAO,JY TANG,FJ YANG
DOI: https://doi.org/10.1016/0168-583x(95)00328-2
1995-01-01
Abstract:Non-Rutherford backscattering has been recognized as a valuable analytical approach to profiling light elements with superior sensitivity and large depth accessibility. However in multielemental analysis the scattering cross sections of elements obtained under the same conditions and a proper computer simulation are preferable. Here a data base of non-Rutherford cross sections was determined precisely at the scattering angle of 165° with helium energy ranging from 2.0–9.0 MeV. The data for carbon and nitrogen have been published previously, and now the data for oxygen are presented. In addition, the results have been compiled into the computer simulation program RUMP, which is valid for simultaneously determining both the stoichiometry and depth profiles of light elements in a heavy element matrix. As examples of such application, the BS spectra of a Ti (C, N, O) film and a coated electrode material were measured with a number of incident energies, and consistent sample descriptions were assumed in the simulation.
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