Quantitative electron probe microanalysis of ultra-light elements

H. Heijligers,G. Bastin
Abstract:Due to the rapid development and expansion ofmaterials science into new areas such as high-temperature materiais, wear-resistant coatings, and modern ceramics, interest in quantitative electron probe microanalysis of ultralight elements, such as B, C, N, and 0, elements which are usually present in considerable quantities in such materiais, is also rapidly growing. Compared with conventional analysis of medium-tohigh Z elements (Z > 11), successful analysis of ultralight elements requires far more stringent adherence to all of the steps involved in the complete procedure; beginning with the specimen preparation, followed by the actuaI intensity measurement, and ending with the matrix correction. As far as specimen preparation and intensity measurements are concerned, a number of specific problems have already been discussed at length (Bastin and Heijligers 1984a, b, 1986a-c), the major problem being the very low count rates and frequently low peak to background ratias, especially for an element like nitrogen. There is also a theoretical possibility that x-ray emission for ultralight elements may exhibit systematic differences from one compound to another. Evidence to this effect has recently been found, for example, for B-
Chemistry,Materials Science
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