Abstract:Scan-free grazing-emission X-ray fluorescence spectroscopy (GEXRF) is an established technique for the investigation of the elemental depth-profiles of various samples. Recently it has been applied to investigating structured nanosamples in the tender X-ray range. However, lighter elements such as oxygen, nitrogen or carbon cannot be efficiently investigated in this energy range, because of the ineffective excitation. Moreover, common CCD detectors are not able to discriminate between fluorescence lines below 1 keV. Oxygen and nitrogen are important components of insulation and passivation layers, for example, in silicon oxide or silicon nitride. In this work, scan-free GEXRF is applied in proof-of-concept measurements for the investigation of lateral ordered 2D nanostructures in the soft X-ray range. The sample investigated is a Si3N4 lamellar grating, which represents 2D periodic nanostructures as used in the semiconductor industry. The emerging two-dimensional fluorescence patterns are recorded with a CMOS detector. To this end, energy-dispersive spectra are obtained via single-photon event evaluation. In this way, spatial and therefore angular information is obtained, while discrimination between different photon energies is enabled. The results are compared to calculations of the sample model performed by a Maxwell solver based on the finite-elements method. A first measurement is carried out at the UE56-2 PGM-2 beamline at the BESSY II synchrotron radiation facility to demonstrate the feasibility of the method in the soft X-ray range. Furthermore, a laser-produced plasma source (LPP) is utilized to investigate the feasibility of this technique in the laboratory. The results from the BESSY II measurements are in good agreement with the simulations and prove the applicability of scan-free GEXRF in the soft X-ray range for quality control and process engineering of 2D nanostructures. The LPP results illustrate the chances and challenges concerning a transfer of the methodology to the laboratory.

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Standardization of Proton Induced X-Ray Emission for Analysis of Trace Elements in Thick Targets

Integrated quantitative PIXE analysis and EDX spectroscopy using a laser-driven particle source

A new facility for High energy PIXE at the ARRONAX Facility

An Upgraded External Beam PIXE Setup for Multielemental Analysis of Atmospheric Aerosol Samples

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Design and calibration of an elliptical crystal spectrometer for the diagnosis of proton-induced x-ray emission (PIXE)

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Characterization of a continuous muon source for the Muon-Induced X-ray Emission (MIXE) Technique

Nuclear Microprobe and Micro-PIXE Analysis of Thick Target: Program and Its Applications

Microbeam Pixe Analysis of Gold-Bearing Mineral Samples

Extended X-ray absorption spectroscopy using an ultrashort pulse laboratory-scale laser-plasma accelerator

Scan-Free GEXRF in the Soft X-ray Range for the Investigation of Structured Nanosamples

Synergizing ICP-MS, STEM-EDXS, and SMPS single particle analytics exemplified by superlattice L10 Pt/Fe aerosol nanoparticles produced by spark ablation

Application of Relativistic Electrons for the Quantitative Analysis of Trace Elements

GermanIum Array for Non-destructive Testing (GIANT) setup for Muon Induced X-ray Emission (MIXE) at the Paul Scherrer Institute

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Identification of Air Pollution Sources by Single Aerosol Particle Fingerprints – Micro-Pixe Spectra