Leakage Current of Ferroelectric Thin Films

YANG Yan,ZHANG Shu-ren,LIU Jing-song,ZHANG Hong-wei,LIU Meng
DOI: https://doi.org/10.3969/j.issn.1009-9239.2006.04.015
2006-01-01
Abstract:The development of ferroelectric memory was always worried by the leakage current of ferroelectric thin films.The thermal electric conduction,space charge limited current(SCLC),Pool-Frenkel emission and Schottky emission were outlined to explained conductive mechanism.The factors of leakage current including thickness of films,temperature,grain size,electrode,doped ions,et al were analyzed.Besides above statements,the influence of the leakage current to polarization and fatigue of ferroelectric films was outlined.
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