Research on Spectral and Temperature Characteristic Test of MEMS Infrared Light Source

Peng ZHANG,Xiujian CHOU,Li LIU,Erwei WANG,Hui ZHANG
2017-01-01
Abstract:MEMS infrared light source is based on micro-electromechanical system (MEMS) fabrication technology. To clarify the radiation spectral distribution characteristic and temperature characteristic, a SR5000 spectrora diameter was adopted for testing MEMS infrared light radiation spectral distribution. The results show that the infrared spectrum of the light source selected mainly distributes between 3-5 μm, and the center wavelength is at 3.6 μm. The infrared thermometer and thermistor had been taken to test the light radiation temperature. The results show that the temperature characteristic of the selected MEMS infrared light source is excellent, and the light source has a wide scope of application.
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