The SIMS Measurement of Zn Concentration Distribution Induced by Laser

Xue-qin ZHANG,Yun-feng WU,Yu-tang YE,Shi-Long JIAO
DOI: https://doi.org/10.3969/j.issn.1003-353X.2005.07.007
2005-01-01
Abstract:Using SIMS, the impurity concentration distribution induced by laser is investigated, a way of measuring diffused areas in the order of μm or10 u m was raised. By means of lithograph on the samples surface, the diffused windows were earmarked, and then the samples were dopped by laser assisted diffusion. Then the samples were analyzed quantitatively by SIMS. The etching depth was measured by scanning probe microscope. So, the research on concentration-depth distribution of extrasmall diffused areas is accomplished.
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