Electrochemical Deposition of DLC Films Embedded with Crystalline Graphite and Multilayer Graphene

Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences,Qiang Li,Zhang Bin
DOI: https://doi.org/10.1007/s11664-020-08703-9
IF: 2.1
2021-01-01
Journal of Electronic Materials
Abstract:Diamond-like carbon (DLC) films embedded with crystalline graphite and multilayer graphene have been fabricated on silicon substrates by a simple electrochemical route from methanol and C 60 -1, 2-ethylenediamine (C 2 H 8 N 2 ) derivatives as an incorporating reagent at atmospheric pressure. The structure and sheet resistivity of the as-obtained films were characterized by x-ray photoelectron spectroscopy, Fourier-transform infrared (FTIR) spectroscopy, scanning electron microscopy, high-resolution transmission electron microscopy, and four-point probe measurements, respectively. The structure of the as-prepared films with crystalline graphite and multilayer graphene consisted of sp 2 C, sp 3 C, C–N, C–H, and N–H bonds. After introducing crystalline graphite and multilayer graphene, the conductivity of the DLC films was evidently improved and the sheet resistivity drastically decreased from 10 8 Ω cm to about 80 Ω cm.
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