Integrated Optical Chip for a High-Resolution, Single-Resonance-mode X-Ray Monochromator System

Ying-Yi Chang,Yi-Wei Tsai,Shih-Chang Weng,Shih-Lun Chen,Shih-Lin Chang
DOI: https://doi.org/10.1364/ol.409833
2021-01-01
Abstract:An integrated optical chip that minimizes the size of the energy-tuning single-resonance-mode x-ray monochromator system into a 3cm×5cm silicon wafer is proposed. A Fabry-Perot x-ray resonator and two back-reflecting Si mirrors are employed on the wafer as the optical components, where Si(12 4 0) back reflection is used for both Fabry-Perot resonance and re-diffraction of the x-ray beams from the resonator in the incident direction. We can achieve an energy bandwidth of 3.4 meV in single-mode x rays and tune the energy by temperature variation. Such Si chips can be readily employed at the synchrotron beamlines and conventional x-ray laboratories for high-resolution investigations.
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