Ultracompact Refractive Index Sensor Based On Integrated Optical Waveguide Trench Coupler

Zhang Chenglong,Cai Chen,Liu Ke,Guan Baolu,Qi Zhimei
DOI: https://doi.org/10.3788/AOS202040.2413001
2020-01-01
Acta Optica Sinica
Abstract:This paper presents an ultra-compact refractive index (RI) sensor based on an integrated optical waveguide trench coupler fabricated on a chip. The coupler consists of an input waveguide, a reflective waveguide, and a transmission waveguide as well as a submicron-wide trench that is located at the intersection of the three waveguides. Light guided in the input waveguide undergoes frustrated total internal reflection on the sidewall of the trench, resulting in the evanescent coupling of light into the transmission waveguide and thus attenuation of light in the reflective waveguide. Because the evanescent field coupling efficiency is dependent on RI of the medium filling in the trench, both the transmitted and reflected light intensities are very sensitive to changes in RI of the liquid in the trench. This means that the integrated optical trench coupler mentioned above can be used as a micro-nano sensor for real-time detection of liquid RI or solution concentration. Performance of this novel optical sensor was theoretically analyzed based on the finite difference time domain (FDTD) method with use of the aluminum nitride ridge waveguide as the simulation model. After optimization of the sensor's geometry, its refractive index sensitivity can reach 207.05 %/RIU.
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