High Sensitivity and Large Measurement Range Refractometric Sensing Based on Mach-Zehnder Interferometer

G. Zhang,H. Cai,Y. D. Gu,J. F. Song,B. Dong,Z. C. Yang,Y. F. Jin,Y. L. Hao,S. P. Sivalingam,P. H. Yap,D. L. Kwong,A. Q. Liu
DOI: https://doi.org/10.1109/memsys.2016.7421619
2016-01-01
Abstract:An on-chip refractive index (RI) sensor with high sensitivity and large measurement range is demonstrated. The sensing scheme presented here is based on Mach-Zehnder interferometer configuration built on an SOI wafer. The measured wavelength sensitivity reaches 3498.6 nm/RIU (TE-mode). Meanwhile, according to the period changes of interference patterns, the measured period sensitivities are 20.4 nm/RIU (TE-mode) and 61.1 nm/RIU (TM-mode), respectively. Therefore, the fine index change detection limit reaches up to 1.1×10 -5 RIU, while the period shift for larger index change detection has a measurement range of several RIU. By making an array, the proposed on-chip sensor has a potential application for multiple samples detection, such as chemical and bio-toxins in drinking water ranging from sub-nanogram to picogram level.
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