Low-loss Photonic Crystal Platform by Foundry Processing

Feifan Wang,Yahui Xiao,Thomas Kananen,Tiantian Li,Zi Wang,Hwaseob Lee,Xiaoyong Hu,Tingyi Gu

DOI: https://doi.org/10.1364/cleo_at.2020.jtu2d.28

2020-01-01

Abstract:We demonstrated a low loss (<1dB) photonic crystal waveguide within a CMOS multiproject wafer, with more than 30 dB extinction ratio.

What problem does this paper attempt to address?

Scalable photonic crystal waveguides with 2 dB component loss

Yahui Xiao,Feifan Wang,Dun Mao,Thomas Kananen,Tiantian Li,Hwaseob Lee,Zi Wang,Tingyi Gu

DOI: https://doi.org/10.1109/LPT.2022.3175157

2023-05-08

Abstract:Periodic or gradient subwavelength structures are basic configurations of photonic crystals and metamaterials. The measured linear losses of those nanophotonic devices are well-beyond theoretical predictions. Nanofabrication related geometric inhomogeneity is considered as the primary cause of the deleterious performance. The deep-UV photolithography in CMOS foundry is a large-scale parallel processing, which can significantly suppress the random offsets and thus the optical linear loss. Here we demonstrate ultra-low loss photonic crystal waveguides with a multi-project wafer run through AIM photonics and post-processing. For sub-millimeter long photonic crystal waveguides, 2 dB total loss and 40 dB extinction ratio are observed across dies.

Optics,Applied Physics
Rectangular Porous-Core Photonic-Crystal Fiber With Ultra-Low Flattened Dispersion and High Birefringence for Terahertz Transmission

Yani Zhang,Xin Jing,Dun Qiao,Lu Xue

DOI: https://doi.org/10.3389/fphy.2020.00370

IF: 3.718

2020-10-08

Frontiers in Physics

Abstract:We propose a novel porous-core photonic crystal fiber (PCF) consisting of asymmetrical rectangular air holes in the core and six-ring hexagonal lattice circular air holes in the cladding for achieving low-loss polarization terahertz transmission in a wide frequency range. By assuming TOPAS as the host material, the finite element method (FEM) is used to investigate its properties. The near-zero flattened dispersion of −0.01±0.02 ps/THz/cm is achieved over a frequency range of 1.0–2.0 THz, as well as a high birefringence of 7.1 × 10<sup>−2</sup> which can be useful for polarization-maintaining applications. Also, critical parameters such as mode field distribution, effective material loss, confinement loss, and effective mode area are discussed in detail. Further, fabrication possibilities are discussed briefly by comparing recent work on similar waveguide structures.<strong>OCIS Codes:</strong> 040.2235 (Far infrared or terahertz), 060.4005 (Micro-structured fibers), 060.2420 (Fibers, polarization-maintaining), 160.5470 (Polymers).

physics, multidisciplinary
Deep UV photolithography enhanced geometric homogeneity for low loss photonic crystal waveguides

Yahui Xiao,Feifan Wang,Dun Mao,Thomas Kananen,Tiantian Li,Hwaseob Lee,Zi Wang,Tingyi Gu

DOI: https://doi.org/10.48550/arXiv.2104.09293

2021-04-13

Abstract:Periodic or gradient subwavelength structures are basic configurations of photonic crystals and metamaterials. While the numerical simulations predict trivial loss, but the fabricated photonic crystal waveguides by E-beam lithography and standard dry etching shows unacceptable loss beyond 10 dB. Nanofabrication variation introduced geometric inhomogeneity is considered as the primary cause of the deleterious performance. The deep UV photolithography in CMOS foundry is a large-scale parallel processing, which can significantly suppress the fabrication-related inhomogeneous offsets and thus the optical linear loss. Here we demonstrate ultra-low loss photonic crystal waveguides with a 300 mm multi-project wafer run. For sub-millimetre long photonic crystal W1 waveguides, consistent performance of 2 dB total loss and 40 dB extinction ratio are observed across different dies.

Applied Physics,Optics
High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Ping Yu,Huiye Qiu,Hui Yu,Feiqing Wu,Zhuoyuan Wang,Xiaoqing Jiang,Jianyi Yang

DOI: https://doi.org/10.1109/lpt.2016.2581205

IF: 2.6

2016-01-01

IEEE Photonics Technology Letters

Abstract:We demonstrate the design, fabrication, and characterization of side-coupled airmode nanobeam photonic crystal cavities in silicon-on-insulator platform. Results show that repeatable devices achieve similar high loaded quality factors (>10(4)) and large optical energy ratio in low refractive region. The unload Q-factors of the fabricated cavities are estimated to exceed 10(5). With side-coupled configuration, high transmission of through port is achieved with typical insertion loss less than 0.5 dB. Wavelength shifts of the measured resonances with respect to the designed values are observed and well explained by considering the fluctuation of etching depth. The demonstrated side-coupled airmode nanobeam photonic crystal cavities may find their applications in ultracompact integrated photonics, especially for on-chip photonic sensor, notch filter, or optical switch.
Low-loss Photonic Device in Ge-Sb-S Chalcogenide Glass.

Qingyang Du,Yizhong Huang,Junying Li,Derek Kita,Jerome Michon,Hongtao Lin,Lan Li,Spencer Novak,Kathleen Richardson,Wei Zhang,Juejun Hu

DOI: https://doi.org/10.1364/ol.41.003090

IF: 3.6

2016-01-01

Optics Letters

Abstract:Low-loss waveguides constitute an important building block for integrated photonic systems. In this work, we investigated low-loss photonic device fabrication in Ge23Sb7S70 chalcogenide glass using electron beam lithography followed by plasma dry etching. High-index-contrast waveguides with a low propagation loss of 0.5 dB/cm and microdisk resonators with an intrinsic quality factor (Q-factor) of 1.2×106 were demonstrated. Both figures represent, to the best of our knowledge, the best low-loss results reported thus far in submicrometer single-mode chalcogenide glass devices.
Ultralow-loss Waveguide Crossing for Photonic Integrated Circuits by Using Inverted Tapers

Lin Han,Xiaoke Ruan,Weijie Tang,Tao Chu

DOI: https://doi.org/10.1364/oe.451104

IF: 3.8

2022-01-01

Optics Express

Abstract:An ultralow-loss silicon planar waveguide crossing operating in the O-band was experimentally demonstrated based on the Gaussian beam synthesis method. Elliptical parabolic inverted tapers were introduced in our design to reduce the crossing loss. According to the measurement results, the proposed device exhibits an insertion loss of 0.008 dB, which is the lowest reported loss for planar silicon waveguide crossings operating in the O-band. The device exhibits a low crosstalk below -40 dB over a 40 nm wavelength range with a compact footprint of 18 × 18 µm2 and can be fabricated in a complementary metal-oxide-semiconductor-compatible process.
New-generation Ultra-Low Loss Silicon Photonic Waveguide and Devices

Long Zhang,Shihan Hong,Yiwei Xie,Daoxin Dai

DOI: https://doi.org/10.1364/acpc.2021.t1i.6

2021-01-01

Abstract:We propose the concept of silicon photonics beyond the singlemode regime with ultra-low-loss propagation of 0.065 dB/cm. The state-of-art micro-racetrack resonator, high-resolution microwave filter and 100-cm-long delayline are demonstrated with standard 220-nm-SOI (silicon-on-insulator) MPW-foundry processes.
Low-loss tantalum pentoxide photonics with a CMOS-compatible process

Zhaoting Geng,Weiren Cheng,Zhiwei Yan,Qiyuan Yi,Zhenyu Liu,Mingjian You,Xiaolun Yu,Pengzhuo Wu,Ning Ding,Xingyu Tang,Min Wang,Li Shen,Qiancheng Zhao

DOI: https://doi.org/10.1364/oe.518545

IF: 3.8

2024-03-21

Optics Express

Abstract:Zhaoting Geng, Weiren Cheng, Zhiwei Yan, Qiyuan Yi, Zhenyu Liu, Mingjian You, Xiaolun Yu, Pengzhuo Wu, Ning Ding, Xingyu Tang, Min Wang, Li Shen, Qiancheng Zhao We report a Ta_2O_5 photonic platform with a propagation loss of 0.49 dB/cm at 1550 nm, of 0.86 dB/cm at ... [Opt. Express 32, 12291-12302 (2024)]

optics
Fano Resonances in Ultracompact Waveguide Fabry-Perot Resonator Side-Coupled Lossy Nanobeam Cavities

Ping Yu,Ting Hu,Huiye Qiu,Fangfang Ge,Hui Yu,Xiaoqing Jiang,Jianyi Yang

DOI: https://doi.org/10.1063/1.4819741

IF: 4

2013-01-01

Applied Physics Letters

Abstract:We propose and demonstrate experimentally an ultracompact resonant system exhibiting sharp asymmetric Fano-resonance, in which a tiny photonic crystal nanobeam cavity is laterally coupled to a waveguide Fabry-Perot resonator. Under the presence of cavity intrinsic loss, we find that the system produces sharper and higher extinction ratio Fano resonance spectra only if appropriate phase is selected. The whole device (∼6 μm2) is implemented on silicon on insulator platform, and experimentally we observe steep-slope Fano resonance with extinction ratio of 7.3 dB, slope above 5 dB/nm, and average insertion loss less than 1.8 dB.
Ultra-Low Loss, Chip-Based Hollow-Core Waveguide Using High-Contrast Grating

Constance Chang-Hasnain,Ming Wu,Eli Yablonovitch

DOI: https://doi.org/10.21236/ada554981

2011-09-28

Abstract:The goal of this program is to develop a chip-scale, integrated photonic platform with fiber-like losses for optical delay applications. The ability to generate long optical delays with low intrinsic loss is useful for a wide range of high precision military applications and systems including: high time-bandwidth product analog optical signal processors and delay lines for wideband RF systems, optical buffers for all-optical routing networks, and ultra-stable optical interferometers for sensing applications, e.g. rotation sensors. We report a completely new concept of chip-scale hollow-core waveguide (HCW) which eliminates dispersion and nonlinearity in typical waveguide core. We demonstrated a new waveguiding design consisting of two parallel silicon-on-insulator wafers, each containing a single layer of high-contrast subwavelength grating (HCG) to reflect light in-between. The optical confinement without any physical boundary is created by variation of HCG dimensions and demonstrated for the first time in a planar HCW with a record low loss of 0.37 dB/em. Two-dimensional light confinement in are demonstrated for both straight and curved waveguides. The unique waveguide geometry not only adds new elements into the waveguiding theory, but also will make possible costeffective manufacturing of integrated optics for chip-scale gas/fluidic sensor, athermal photonic delays lines, and lab-on-a-chip applications.
Low-loss Zero-index Waveguides and Devices

Tian Dong,Tianxiang Dai,Ye Chen,Yueyang Liu,Hancheng Liu,Yiting Wang,Anqi Ma,Haifeng Hu,Lihua Xu,Le Zhao,Weiguo Chu,Chao Peng,Jianwei Wang,Yang Li

DOI: https://doi.org/10.1364/cleo_si.2024.sf3g.1

2024-01-01

Abstract:We report flexible zero-index waveguides and devices whose loss is two orders of magnitude lower than the state of the art, enabling phase-error-free high-dense photonic integrated circuits for classical and quantum information processing and computing.
Foundry Integrated Nanophotonic Devices and Metasystems

Tingyi Gu,Yahui Xiao,Zi Wang,Dun Mao,Feifan Wang,Tiantian Li,Hwaseob Lee

DOI: https://doi.org/10.1364/fio.2020.fw1b.1

2020-01-01

Abstract:We will present our recent progress of foundry processed low loss photonic crystals, metasurface and metasystem, towards the femtojoule optical switch, tapers with ten folds length reduction and on-chip analog mathematical operation.
Ultra-low loss waveguide platform in silicon photonics

Arijit Bera,Yisbel Marin,Mikko Harjanne,Matteo Cherchi,Timo Aalto

DOI: https://doi.org/10.1117/12.2610022

2022-03-05

Abstract:Silicon photonics is the most promising technology for applications ranging from large-bandwidth, low power consumption datacom transceivers, to wearable health monitoring devices, or optical data-bus for quantum processors. To bring silicon PIC based products to the market, ultra-low loss waveguides would be preferred. In the conventional submicron silicon platforms, higher propagation loss (in the order of ~1 dB/cm) induced by the roughness of the etched sidewalls, as well as higher fiber-to-waveguide coupling loss due to its sub-micron dimensions impose challenges for its deployment in many products. VTT’s thick-SOI technology offers a promising alternative, owing to its lower propagation loss (~0.1 dB/cm), reduced polarization sensitivity, and capacity to handle higher optical power without exciting nonlinear losses. Its micron-scale cross-section enables efficient edge coupling. Exploiting its ultra-low loss, we have demonstrated unprecedented level of integration such as, a 40-channel array waveguide grating (AWG) based mux/de-mux, or a Faraday rotator based on silicon spirals, without employing any magneto-optic material. Now we reduced the propagation loss further, down to record-low 4 dB/m, by controlled annealing of waveguides in 100% pure H2 environment. In our optimized, MPW-compatible annealing process, the atomic mobility of Si smoothens the scallops from etching, without causing any structural deformation of the waveguides. This substantially reduced loss enabled us to develop ultra-high Q ring resonators on our thick-SOI platform, as well as sidewall smoothening for the active components, thereby making our platform a bedrock for the emerging applications such as, quantum computing, biosensors, and 3D imaging.
Low loss hollow-core waveguide on a silicon substrate

Weijian Yang,James Ferrara,Karen Grutter,Anthony Yeh,Chris Chase,Yang Yue,Alan E. Willner,Ming C. Wu,Connie J. Chang-Hasnain

DOI: https://doi.org/10.1515/nanoph-2012-0003

IF: 7.5

2012-06-21

Nanophotonics

Abstract:Abstract Optical-fiber-based, hollow-core waveguides (HCWs) have opened up many new applications in laser surgery, gas sensors, and non-linear optics. Chip-scale HCWs are desirable because they are compact, light-weight and can be integrated with other devices into systems-on-a-chip. However, their progress has been hindered by the lack of a low loss waveguide architecture. Here, a completely new waveguiding concept is demonstrated using two planar, parallel, silicon-on-insulator wafers with high-contrast subwavelength gratings to reflect light in-between. We report a record low optical loss of 0.37 dB/cm for a 9-μm waveguide, mode-matched to a single mode fiber. Two-dimensional light confinement is experimentally realized without sidewalls in the HCWs, which is promising for ultrafast sensing response with nearly instantaneous flow of gases or fluids. This unique waveguide geometry establishes an entirely new scheme for low-cost chip-scale sensor arrays and lab-on-a-chip applications.

optics,physics, applied,materials science, multidisciplinary,nanoscience & nanotechnology
300-Nm-thick, Ultralow-Loss Silicon Nitride Photonic Integrated Circuits by 8-In. Foundry Production

Xuguang Zhang,Yuxin Liang,Yujun Chen,Bitao Shen,Jiahui Huang,Chenghao Lao,Yichen Wu,Zhihui Li,Dapeng Liu,Haowen Shu,Weiwei Hu,Xingjun Wang,Naidi Cui,Lin Chang

DOI: https://doi.org/10.1063/5.0221409

IF: 4

2024-01-01

Applied Physics Letters

Abstract:Silicon nitride (Si3N4) photonic integrated circuits are rapidly developing in recent decades. The low loss of Si3N4 attracts significant attention and facilitates a wide range of applications in integrated photonics. In this work, we demonstrate the foundry fabrication of a 300-nm-thick 8-in. wafer-scale Si3N4 platform, with a microresonator intrinsic quality factor of up to 15x106, corresponding to an ultralow loss of 2.2 dB/m. Leveraging this platform, we develop a mature process design kit, achieving a single-mode waveguide propagation loss of less than 5 dB/m, an edge coupler loss of 1.3 dB, and an insertion loss of 0.07 dB for multimode interference couplers. Utilizing the processed Si3N4 chip, we realize a hybrid integrated tunable external cavity laser with a tuning range from 1534 to 1602 nm, a record-high side-mode suppression ratio of up to 76 dB, an optical power of 26 mW, and an intrinsic linewidth of down to 314 Hz. Our work lays a solid foundation for the further development of applications, including nonlinear optics, quantum optics, optical communications, and ranging.
Ultralow-Loss Silicon Photonics beyond the Singlemode Regime

Long Zhang,Shihan Hong,Yi Wang,Hao Yan,Yiwei Xie,Tangnan Chen,Ming Zhang,Zejie Yu,Yaocheng Shi,Liu Liu,Daoxin Dai

DOI: https://doi.org/10.1002/lpor.202100292

2022-01-01

Abstract:Silicon photonics beyond the singlemode regime is applied for enabling ultralow-loss waveguide propagation for the fundamental mode even without any special fabrication process. Here a micro-racetrack resonator is fabricated with a standard 220-nm-SOI (silicon-on-insulator) multiproject-wafer foundry and shows a record high intrinsic quality factor of 1.02x10(7), corresponding to an ultralow propagation loss of only 0.065 dB cm(-1), which is about 20 times less than that of regular 450-nm-wide waveguides on the same chip. A state-of-the-art microwave photonic filter on silicon is then realized with an ultranarrow 3-dB bandwidth of 20.6 MHz and a tuning range of approximate to 20 GHz for the first time. A 100-cm-long delayline employed the broadened waveguides is also demonstrated with compact 90 degrees Euler-curve bends, and the measured average propagation loss is about 0.14 dB cm(-1). The concept of silicon photonics beyond the singlemode regime helps solve the issue of high propagation loss significantly. In particular, it enables silicon photonic devices with enhanced performances, which paves the way for realizing large-scale silicon photonic integration. This concept can be extended further to any other material platforms, such as silicon nitride and lithium niobate. This also brings numerous new opportunities for various applications such as nonlinear photonics, large-scale photonic integration, quantum photonics, microwave photonics, etc.
Low-loss photonic crystal fibers for transmission systems and their dispersion properties

C. Jacobsen,M.D. Nielsen,N.A. Mortensen,J.R. Folkenberg,H.R. Simonsen

DOI: https://doi.org/10.48550/arXiv.physics/0403132

2004-03-26

Optics

Abstract:We report on a single-mode photonic crystal fiber with attenuation and effective area at 1550 nm of 0.48 dB/km and 130 square-micron, respectively. This is, to our knowledge, the lowest loss reported for a PCF not made from VAD prepared silica and at the same time the largest effective area for a low-loss (< 1 dB/km) PCF. We briefly discuss the future applications of PCFs for data transmission and show for the first time, both numerically and experimentally, how the group velocity dispersion is related to the mode field diameter
Ultra Low Loss Photonic Crystal Waveguides Based On The Self-Collimation Effect

D Pustai

DOI: https://doi.org/10.1117/12.518370

2004-01-01

Abstract:In this paper, we review the confinement mechanism of self-collimation in planar photonic crystals. In this mechanism, an approximately flat equi-frequency contour (EFC) below the light cone of the planar photonic crystal can be used to laterally confine the light and total internal reflection (TIR) provides vertical confinement. To this end, self-collimation in both low-index and high-index planar photonic crystals are investigated using the three-dimensional (3D) finite-difference time-domain (FDTD) method and the 3D iterative plane wave method (PWM). It is found that low-loss self-guiding is achievable in both the valence and conduction bands for high-index planar photonic crystals. However, for low-index planar photonic crystals, low-loss self-guiding can be only observed in the valence band. Experimental results show a propagation loss of as low as 1.1 dB/mm for the self-guiding in a high-index planar photonic crystals.
3D Laser Writing of Low‐Loss Cross‐Section‐Variable Type‐I Optical Waveguide Passive/Active Integrated Devices in Single Crystals

Daoyuan Chen,Zhi Chen,Yi Yang,Yuying Wang,Xuhu Han,Kuen Yao Lau,Zhemin Wu,Chen Zou,Yu Zhang,Beibei Xu,Xiaofeng Liu,Zhijun Ma,Guoping Dong,Giuseppe Barillaro,Lijing Zhong,Jianrong Qiu

DOI: https://doi.org/10.1002/adma.202404493

IF: 29.4

2024-05-10

Advanced Materials

Abstract:Optical waveguides fabricated in single crystals offer crucial passive/active optical components for photonic integrated circuits. Single crystals possess inherent advantages over their amorphous counterpart, such as lower optical losses in visible‐to‐mid‐infrared band, larger peak emission cross‐section, higher doping concentration. However, the writing of Type‐I positive refractive index modified waveguides in single crystals using femtosecond laser technology presents significant challenges. Herein, we introduce a novel femtosecond laser direct writing technique that combines slit‐shaping with an immersion oil objective to fabricate low‐loss Type‐I waveguides in single crystals. This approach allows for precise control of waveguide shape, size, mode‐field and refractive index distribution, with a spatial resolution as high as 700 nm and a high positive refractive index variation on the order of 10−2, introducing new degrees of freedom to design and fabricate passive/active optical waveguide devices. As a proof‐of‐concept, we successfully produced a 7 mm‐long circular‐shaped gain waveguide (∼10 μm in diameter) in an Er3+‐doped YAG single crystal, exhibiting a propagation loss as low as 0.23 dB/cm, a net gain of ∼3 dB and a polarization‐insensitive character. The newly‐developed technique is theoretically applicable to arbitrary single crystals, holding promising potential for various applications in integrated optics, optical communication, and photonic quantum circuits. This article is protected by copyright. All rights reserved

materials science, multidisciplinary,nanoscience & nanotechnology,physics, applied,chemistry, physical, condensed matter
Low-Loss Waveguide Crossing for Complicated On-Chip Microwave Photonic Processor

Ziyang Lu,Jiachen Li,Hongwei Chen,Sigang Yang,Minghua Chen

DOI: https://doi.org/10.1109/jphot.2024.3366937

IF: 2.4

2024-03-15

IEEE Photonics Journal

Abstract:To realize large device density and high complexity in future on-chip microwave photonic system, a waveguide crossing with low loss, crosstalk and reflection is designed on the silicon nitride waveguide platform, which is compatible for on-chip microwave photonic processor. Furthermore, a multi-channel microwave photonic signal processing chip is fabricated based on the proposed waveguide crossings, and the performance of the chip is evaluated. In simulation, the proposed waveguide crossing maintains an insertion loss of ∼0.08 dB per crossing in the wavelength range of 1500 nm – 1600 nm, while the experiment result is 0.086 dB per crossing. As the wavelength changes, the measured variation of insertion loss per crossing is less than 0.02 dB. The crossings on the signal processing chip induce an extra insertion loss of 1.2 dB to each channel. Meanwhile, the measured crosstalk and reflection are both below −44 dB. Furthermore, the proposed waveguide crossing shows significant robustness for fabrication. With the advantages of ultra-low loss, crosstalk and reflection, the proposed waveguide crossing may support the establishment for future complicated on-chip microwave photonic systems.

engineering, electrical & electronic,optics,physics, applied

Low-loss Photonic Crystal Platform by Foundry Processing

Scalable photonic crystal waveguides with 2 dB component loss

Rectangular Porous-Core Photonic-Crystal Fiber With Ultra-Low Flattened Dispersion and High Birefringence for Terahertz Transmission

Deep UV photolithography enhanced geometric homogeneity for low loss photonic crystal waveguides

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Low-loss Photonic Device in Ge-Sb-S Chalcogenide Glass.

Ultralow-loss Waveguide Crossing for Photonic Integrated Circuits by Using Inverted Tapers

New-generation Ultra-Low Loss Silicon Photonic Waveguide and Devices

Low-loss tantalum pentoxide photonics with a CMOS-compatible process

Fano Resonances in Ultracompact Waveguide Fabry-Perot Resonator Side-Coupled Lossy Nanobeam Cavities

Ultra-Low Loss, Chip-Based Hollow-Core Waveguide Using High-Contrast Grating

Low-loss Zero-index Waveguides and Devices

Foundry Integrated Nanophotonic Devices and Metasystems

Ultra-low loss waveguide platform in silicon photonics

Low loss hollow-core waveguide on a silicon substrate

300-Nm-thick, Ultralow-Loss Silicon Nitride Photonic Integrated Circuits by 8-In. Foundry Production

Ultralow-Loss Silicon Photonics beyond the Singlemode Regime

Low-loss photonic crystal fibers for transmission systems and their dispersion properties

Ultra Low Loss Photonic Crystal Waveguides Based On The Self-Collimation Effect

3D Laser Writing of Low‐Loss Cross‐Section‐Variable Type‐I Optical Waveguide Passive/Active Integrated Devices in Single Crystals

Low-Loss Waveguide Crossing for Complicated On-Chip Microwave Photonic Processor