Scalable photonic crystal waveguides with 2 dB component loss

Yahui Xiao,Feifan Wang,Dun Mao,Thomas Kananen,Tiantian Li,Hwaseob Lee,Zi Wang,Tingyi Gu
DOI: https://doi.org/10.1109/LPT.2022.3175157
2023-05-08
Abstract:Periodic or gradient subwavelength structures are basic configurations of photonic crystals and metamaterials. The measured linear losses of those nanophotonic devices are well-beyond theoretical predictions. Nanofabrication related geometric inhomogeneity is considered as the primary cause of the deleterious performance. The deep-UV photolithography in CMOS foundry is a large-scale parallel processing, which can significantly suppress the random offsets and thus the optical linear loss. Here we demonstrate ultra-low loss photonic crystal waveguides with a multi-project wafer run through AIM photonics and post-processing. For sub-millimeter long photonic crystal waveguides, 2 dB total loss and 40 dB extinction ratio are observed across dies.
Optics,Applied Physics
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