Aluminium Nitride Thin Film Acoustic Wave Device For Microfluidic And Biosensing Applications
Y. Q. Fu,J. S. Cherng,J. K. Luo,M. P. Y. Desmulliez,Y. Li,A. J. Walton,F. Placido
2010-01-01
Abstract:Y.Q. Fu1, J. S. Cherng2, J. K. Luo3, M.P.Y. Desmulliez1, Y. Li4, A. J. Walton4 and F. Placido5 1School of Engineering and Physical Sciences, Institute of Integrated Systems, Heriot-Watt University, Edinburgh, EH14 4AS, 2Department of Materials Engineering, Mingchi University of Technology, Taishan, Taipei, 3Centre for Material Research and Innovation, University of Bolton, Deane Road, Bolton, BL3 5AB, 4 Scottish Microelectronics Centre, School of Engineering, Institute of Integrated Systems, University of Edinburgh, Edinburgh, EH10 7AT, 5Thin Film Centre, University of the West of Scotland, Paisley, PA1 2BE, 1,3,4,5UK 2Taiwan