Athermal silicon ring resonators clad with titanium dioxide for 1.3 mu m wavelength operation

Shaoqi Feng,Kuanping Shang,Jock T. Bovington,Rui Wu,Binbin Guan,Kwang-Ting Cheng,John E. Bowers,S. J. Ben Yoo
DOI: https://doi.org/10.1364/OE.23.025653
IF: 3.8
2015-01-01
Optics Express
Abstract:We investigate the athermal characteristics of silicon waveguides clad with TiO2 designed for 1.3 mu m wavelength operation. Using CMOS-compatible fabrication processes, we realize and experimentally demonstrate silicon photonic ring resonators with resonant wavelengths that vary by less than 6 pm/degrees C at 1.3 mu m. The measured ring resonance wavelengths across the 20-50 degrees C temperature range show nearly complete cancellation of the first-order thermo-optical effects and exhibit second-order thermo-optical effects expected from the combination of TiO2 and Si. (C) 2015 Optical Society of America
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