Out-Of-Squareness Measurement on Ultra-Precision Machine Based on the Error Separation

Tao Lai,Junfeng Liu,Shanyong Chen,Chaoliang Guan,Guipeng Tie,Quan Liao

DOI: https://doi.org/10.1117/12.2270171

2017-01-01

Abstract:Traditional methods of measuring out-of-squareness of ultra-precision motion stage have many limitations, especially the errors caused by inaccuracy of standard specimens, such as bare L-square and optical pentaprism. And generally, the accurate of out-of-squareness measurement is lower than the accurate of interior angles of standard specimens. Based on the error separation, this paper presents a novel method of out-of-squareness measurement with a polygon artifact. The angles bounded with the guideways and the edges of polygon artifact are measured, and the out-of-squareness distraction is achieved by the principle that the sum of internal the angles of a convex polygon artifact is (n-2)pi. A out-of-squareness metrical experiment is carried out on the profilometer by using an optical square brick with the out-of-squareness of interior angles at about 1140.2 arcsec. The results show that the measurement accuracy of three out-of-squareness of the profilometer is not affected by the internal angles. The measurementwith the method can be applied to measure the machine error more accurate and calibrate the out-of-squareness of machine.