Effect of solvent on morphological properties of TiOx thin film
mengyueh liu,chinhsiang chang,jingshun huang,chiashin chao,yuhong lin,wenhan lin,chingfuh lin
DOI: https://doi.org/10.1117/12.825421
2009-01-01
Abstract:ABSTRACT Sol-gel preparation of amorphous titanium oxide (TiO x ) thin films with distinct morphological properties on the hydrophobic substrate was obtained by solution spin coating method. The TiO x thin films were deposited by three precursors using 2-methoxyethanol (2MOE), isopropanol (IPA) and mixture of 2MOE and hexane as solvents. We demonstrate evidence that the morphology of TiO x thin film is strongly related to the employment of dissimilar solvent. Among these three solvents, TiO x film obtained from 2MOE/hexane mixed solvent is a superior choice for the preparation of TiO x thin film on the hydrophobic substrate b ecause of its smooth surface morphology. Keywords: Titanium oxide, thin film, TiO x , hydrophobic, solvent 1. INTRODUCTION During the past years, there have been numerous interests in the fabrication of titanium dioxide due to its nontoxic and environmental friendly characters [1]. Titanium dioxide has lots of relevant nature such as brilliant transmittance in the visible spectrum, high refractive index (2.7), good chemical and electrical stability. Consequently, its thin films are particularly suitable for optoelectronic devices. For instance, they are already applied to photocatalysis [2-5], antireflection coatings [6], sensors [7, 8], and photovoltaics [9-15]. Extensive research has focused on the synthesis techniques of titanium dioxide thin film, like MOCVD [16, 17], radio frequency magnetron sputtering [18], and sol-gel deposition [19-22]. In the view point of low cost and simplic ity, many researchers have employed low temperature sol-gel method to deposit titanium dioxide film. This solution-base d method has also been utilized successfully to grow thin films on the polymer substrate which can not sustain high temperature processing. The recent study mostly reports the solvent used in the preparation of titanium dioxide films by sol-gel solution technique based on alcohols. Verma et al. [23] dissolved titanium (IV) isopropoxide (Ti[OCH(CH