Abstract:Thin-film lithium niobate (TFLN) has been considered as one of the most important platforms for constructing high-performance photonic integrated devices such as electro-optic modulators, frequency combs, classical/quantum light sources, and large-scale photonic integrated circuits, benefiting from its excellent optical properties of TFLN. The fabrication quality of TFLN photonic integrated devices plays an important role in the performance and the integration scale of these devices. As one of the element photonic structures, the state-of-the-art TFLN microrings reach an intrinsic Q factor higher than 10^7 with ultra-smooth sidewalls, fabricated by photolithography assisted chemo-mechanical etching (PLACE). However, it is isolated on the chip surface and a tapered fiber is required to couple the light into and out of the resonator. Furthermore, it is difficult to maintain such high-Q factors when the microrings are monolithically integrated with bus waveguides by PLACE, resulted from large coupling loss with biggish coupling gap. Here, a relatively narrow gap of an ultra-high Q microring monolithically integrated with the bus-waveguide is achieved with 3.8 um by optimizing PLACE process, and a high temperature annealing is carried out to improve the loaded (intrinsic) Q factor with 4.29 X 10^6 (4.04 X 10^7), leading an ultra-low propagation loss of less than 1 dB/m, which is approximately 3 times better than the best values previously reported in ion-slicing TFLN platform.

Ultra-Low Loss Lithium Niobate Photonics

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Ultrahigh quality-factor microresonators fabricated in pristine lithium niobate thin film for efficient nonlinear optics applications

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Ultra-low loss photonic circuits in Lithium Niobate On Insulator

Advancing Integrated Photonics and Microreactor Technologies with Ultrafast Laser Processing

Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness

Low-loss Lithium Niobate on Insulator (LNOI) Waveguides of a 10 cm-length and a Sub-nanometer Surface Roughness

Ultrabroadband Low-Crosstalk Dense Lithium Niobate Waveguides by Floquet Engineering

High-Precision Propagation-Loss Measurement of Single-Mode Optical Waveguides on Lithium Niobate on Insulator

Recent development in integrated Lithium niobate photonics

Fabrication of low-loss lithium niobate on insulator waveguides on the wafer scale

Scalable, fiber-compatible lithium-niobate-on-insulator micro-waveguides for efficient nonlinear photonics

High-precision measurement of a propagation loss of single-mode optical waveguides on lithium niobate on insulator

Low-loss fiber-to-chip interface for lithium niobate photonic integrated circuits

High-precision measurement of a propagation loss of low-loss single-mode optical waveguides on lithium niobate on insulator

Ultralow-Loss Etchless Lithium Niobate Integrated Photonics at Near-Visible Wavelengths

Monolithic Ultrahigh-Q Lithium Niobate Microring Resonator

Low-loss Photonic Device in Ge-Sb-S Chalcogenide Glass.

Ultra-high Q lithium niobate microring monolithically fabricated by photolithography assisted chemo-mechanical etching

High-index-contrast single-mode optical waveguides fabricated on lithium niobate by photolithography assisted chemo-mechanical etching (PLACE)